壓電式無閥門微幫浦之參數研究

本文針對不同致動腔室容積和出入口位置進行壓電式無閥門微幫浦的結構設計及性能測試，並建立一套觀測設備，經由改變多種參數，觀察其效能和作動狀況，並紀錄此壓電式無閥門微幫浦的流率與背壓等資訊，期能提供微幫浦設計時明確而充分的資料，進而對微幫浦的效率有進一步的研究探討。過去對微幫浦之研究雖多，卻極少完整的比較不同出入口和腔室容積間的差異，本實驗的控制參數為出入口位置、致動腔室深度、驅動頻率及驅動電壓。出入口位置分為中間進口旁邊出口、旁邊進口中間出口、旁邊進口旁邊出口三種，腔室深度有0.4 mm、0.8 mm、1.6 mm三種，驅動頻率為40 Hz、70 Hz、100 Hz、130 Hz、160 Hz、190 Hz、220 Hz七種，驅動電壓為100V和140V。實驗主要探討三部份:一為無閥門微幫浦在每次裝置的可靠度驗證；二為不同腔室深度的微幫浦改變對流體推動的影響；三為不同出入口位置的搭配對流體推動現象的影響，最後將實驗數據加以分析。本文中所使用的微幫浦的最大的質量流率是5.8045 g/min，最大背壓是106.6mm H2O，都出現在腔室深度1.6 mm、電壓140V，驅動頻率130Hz，中間出口旁邊進口的組合。

關鍵字

壓電；微幫浦；無閥門

並列摘要

This thesis aims to investigate the design and performance differences of a Piezoelectric Valve-less Micropump (PVM) based upon different sizes of chamber volumes and the inlet/outlet positions. Observation is done through a set of monitoring devices, by changing various parameters to measure the performances and moving situations (pattern?). Data such as flow rate, and pressure etc of the PVM are obtained during measurement in order to provide explicit and valid data for the PVM. Finally the data will be used to further investigate the PVM efficiency. Although many researches was conducted with regards to micropump, a complete comparison of chamber volume and the positions of inlet/outlet was incomplete. The control variables of this research are chamber height, positions of intlet/outlet, driving frequency and voltage. The experiment is devided into three parts: The stability of micropump in different setups, fluid push influence of the micropump working pattern with different chamber height, and the performance analysis of the micropump inlet and outlate collocation. Analysis of the experiment data is discussed at the end. The result discovered to have the largest mass flow rate of 5.8045g/min and the uppermost pressure is 106.6 mm H2O. The combinations of variables are at the chamber height of 1.6 mm, the driving voltage of 140V, frequency 130Hz, at the inlet/outlet combination shown as the diagram below: i.e. left inlet middle outlet.

並列關鍵字

piezoelectric ； micropump ； valve-less

參考文獻

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壓電式無閥門微幫浦之參數研究

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