應用於高科技廠房振動環境之半主動控制減振器

Semi-Active Vibration Absorber for Vibration Control in High-Tech Fab

盧韜仁(Tau-Jen Lu)

指導教授 ： 洪振發

國立臺灣大學/工學院/工程科學及海洋工程學研究所/碩士(2012年)

https://doi.org/10.6342/NTU.2012.10754

摘要

考慮現代高科技廠房高馬力設施頗多，降低振源之振動量為首要考量。本文旨在探討應用於高科技廠房之半主動控制減振器，針對晶圓廠製成冷卻水系統中馬力較大、振動量較高之動力幫浦進行減振，以配合其營運操作狀態之高微振標準，並探討現有機台之隔振系統與廠房之樓地板振動傳遞情形。
本研究發展「調整勁度以改變振動特性」之減振器，針對可變頻高馬力設施之運轉器械所引致的振動進行減振，不僅考慮主系統共振狀態之減振，也考慮非共振狀態下之減振。減振器主體為懸臂樑末端掛載一固定質量塊，透過直流馬達轉動齒輪、帶動懸臂樑兩側齒條即可控制懸臂樑之伸縮長度，進而改變減振器之自然頻率，待達要求頻率後，再以磁力鎖固定懸臂樑前端部位，即可進行減振。本研究藉由控制懸臂樑伸縮長度，以簡化控制上的難度，同時避免減振器產生額外模態，經實驗證明，本設計可有效地降低主系統於共振及非共振狀態下之振動量。
本文並以有限元素軟體Ansys Workbench進行分析，配合實際廠房量測數據，針對大馬力運轉器械之隔振系統進行探討，比較各種情況下，機台各點之振動情形；並將前述減振器置於高科技廠房內進行全廠模擬，比較加入減振器前後，大型馬達運轉時所產生的振動，經由樓地板的傳遞對於敏感區域以及傳遞路徑上各點的振動影響。根據模擬，於廠房內之大馬力運轉器械之機台上加裝減振器在非共振頻帶，確實可以降低機台及區域內（約20公尺內）樓地板之振動量2dB左右。

關鍵字

高科技廠房 ； 減振 ； 半主動控制 ； 共振 ； 非共振 ； 隔振

並列摘要

To reduce the vibration caused by high power facilities in high-tech FABs, the application of semi-active vibration absorber is proposed and studied in this paper. The objective is to reduce the vibration caused by high power facility, eq. the process cooling water system (PCW) in order to meet the requirement of micro-vibration standard during operation. Moreover, the characteristics of isolation system of PCW and fab floors are discussed.

In this study, the vibration absorber which could change the vibration property by tuning its stiffness is suitable to reduce the vibration caused by the operation of the high power varying frequency facility. The vibration reducing method takes not only the resonant but the non-resonant condition into account. The vibration absorber consists of mass block, cantilever beam, magnet lock system, vibration and distance sensor, controller and servo motor. Portion of cantilever was cut in form of gear tracks, which can be driven by servo motor through transmit gear to regulate the beam length and the frequency of absorber. After the mass locates at right position (i.e. the natural frequency of absorber is in assigned condition), the magnetic lock will clamp the cantilever beam. The feature of changeable cantilever beam length is able to simplify the control difficulty and avoid the extra mode caused by absorber, and the experiment proves that it can greatly reduce vibration of main system at both resonant and non-resonant frequencies.

According to the measurement data of PCW in 2008, the finite element method was used to simulate and analyze the different situations of vibration. We also studied the responses of high power motors (main system) in different input cases. In addition, the absorber design was installed into the fab model, and a whole fab simulation was made. Finally, the response comparison of installation and uninstallation of absorber for the vibration transmission caused by high power motor passing through floor and sensitive area was discussed and studied.

並列關鍵字

high-tech FAB ； vibration attenuation ； semi-active control ； resonant ； non-resonant ； vibration isolation

參考文獻

洪振發、郭柏辰，高科技廠房之設備及管線振動量測系統，2008。

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