應用表面電漿現象於三原色彩色濾波片及全彩光偵測器之研究

表面電漿，本身為一沿金屬與介電質接面傳遞的電漿波，在特定波段具有高穿透率是其最常被提及的特性。一般引發表面電漿波的方式除了以稜鏡耦合之消逝全反射法之外；便是製作一週期性結構使得入射光耦合成表面電漿波。表面電漿波在金屬與介電材料介面產生時，包含了電磁波與表面電荷震盪的特性。而表面電荷震盪的特性為由垂直於介面的電場所產生。此種電磁波與表面電荷震盪的特性使得能量在介面產生且在垂直方向呈指數次方遞減。利用次波長結構週期可以控制表面電漿的異常穿透特性，此現象非常適合將表面電漿現象應用在次波長結構的生物感測器或光電元件上。本論文是利用表面電漿特性，應用在三原色RGB彩色濾波片，與全彩式光偵測器上，我們必須克服的困難是來自於週期結構的表面電漿，存在高階模態。這些非必要的波段的穿透光將影響其色度上的要求。本論文模擬二維金屬結構的異常穿透峰值，利用調變孔洞大小、結構週期、金屬厚度等來控制異常穿透頻譜。另外，加上非晶矽吸收層的抑制高接模態的異常穿透，將非必要波段的異常穿透強度降低，消除其對色度要求上的影響。而設計出不論在色度與強度上皆符合國際規範的三原色RGB彩色濾波片與全彩式光偵測器結構。最後，透過實驗的解果，成功的將表面電漿之彩色濾波功能整合於全彩式光偵測器上。

關鍵字

濾波片；光偵測器

並列摘要

Surface plasmon (SP), an electromagnetic wave, propagates along the metal and dielectric surface. It’s well known that surface plasmon resonance (SPR) will induce an extraordinary transmission. Generally speaking, there are two ways to excite the surface plasmon wave. One is the prism-based attenuated total reflection (ATR) method, and the other is using a periodic structure to induce extra wave vector. Extraordinary transmission of surface plasmon phenomenon can be controlled by periodical structures that can be developed for sensing and opto-electronic devices. In this thesis, the surface plasmon phenomenon is introduced for RGB color filters and full color photodetectors. However, the existence of high order of SPR based transmission at the undesired wavelength region would affect the purity of color filters..Therefore, we simulated various two-dimensional metal structures to control the peak of extraordinary transmission for RGB color filters. The transmission spectra of hole-arrays can be tuned by adjusting the hole size, period, and metal film thickness. Furthermore, an amorphous silicon film plays an absorbed layer to suppress the high order of extraordinary transmission. In this thesis, we have designed the RGB color filters, which meet the requirement of National Television System Committee (NTSC). And we also used the RGB color filters to fabricate a full color photodetector having the suitable color purity and transmission intensity. The experimental results successfully demonstrate the application of SPR phenomenon in a full color photodetector.

並列關鍵字

filters ； photodetectors

參考文獻

[1] Lin Panga,Grace M. Hwang,Boris Slutsky and Yeshaiahu Fainman ”Spectral sensitivity of two-dimensional nanohole array surface plasmon polariton resonance sensor” APPLIED PHYSICS LETTERS, 91, 123112, 2007

[2] Thomas H. Reilly III, Jao van de Lagemaat, Robert C. Tenent, Anthony J. Morfa,

and Kathy L. Rowlen “Surface-plasmon enhanced transparent electrodes in organic photovoltaics” APPLIED PHYSICS LETTERS, 92, 243304, 2008

[3] J. Hetterich, G. Bastian, N. A. Gippius, S. G. Tikhodeev, G. von Plessen, and U. Lemmer ”Optimized Design of Plasmonic MSM Photodetector” IEEE JOURNAL OF QUANTUM ELECTRONICS, VOL. 43, NO. 10, OCTOBER 2007

[4] 吳民耀, 劉威志 ”表面電漿子理論與模擬” 物理雙月刊（廿八卷二期） 2006 年4 月

國際替代計量

應用表面電漿現象於三原色彩色濾波片及全彩光偵測器之研究

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