壓電驅動球型三自由度超音波馬達之設計

Design of Piezoelectric Driving Three-DOF Ball-type Ultrasonic Motor

金志倫(Chih-Lun Chin)

指導教授 ： 張所鋐

國立臺灣大學/工學院/機械工程學研究所/碩士(2011年)

https://doi.org/10.6342/NTU.2011.02704

摘要

本論文設計開發一種三自由度超音波馬達，可達到三軸轉動及高速轉動的效能。由前蓋(Horn)和後蓋(Back)將四片壓電片組成藍杰文振動子。在Horn的前端鎖上驅動針，使藍杰文振動子在空間中具有三個互相垂直方向的振幅，藉由不同的振動模態所產生的橢圓型軌跡，磨擦驅動球型運動子。三個互相垂直擺置的電磁鐵，藉由和具有導磁性球型運動子之間的磁吸力，限制球型運動子轉動方向。
透由藍杰文振動子不同的驅動條件下，此型超音波馬達可同時具有高轉速及低轉速的效能。在致動過程中，以光槓桿的方式量測球型運動子轉動。各軸最高轉速可到達300rpm，最低驅動電壓也可在20Vpp以下。由量測結果發現，各軸向轉動的最大轉速分別為X軸轉向，在輸入63.6 Vpp，60 kHz交流電壓下，正轉(θx)轉速可達566rpm；在輸48.4Vpp，60 kHz交流電壓下，反轉(-θx)轉速可達242 rpm。Y軸轉向，在輸入60.4 Vpp，61 kHz交流電壓下，正轉(θy)轉速可達1830 rpm；在輸63.6Vpp，60 kHz交流電壓下，反轉(-θy)轉速可達500rpm。Z軸轉向，在輸入66 Vpp，62 kHz交流電壓下，正轉(θz)轉速可達443rpm；在輸63.6Vpp，60 kHz交流電壓下，反轉(-θz)轉速可達365rpm。各項效能文獻中的各種超音波達作比較，可發現本研究超音波馬達擁有低驅動電壓，高轉速的優異的效能。未來應用層面廣泛。

關鍵字

超音波馬達 ； 壓電材料 ； 藍杰文振動子 ； 光槓桿 ； 電磁鐵

並列摘要

The paper presented a novel design of a Three-DOF ball-type Actuator, which was developed for achieving three-axial rotation and high rotational speed. The Langevin transducer consisted of a front mass (horn), rear mass (back) with four piezoelectric and a driving needle inserted on the top. The driving needle oscillated with three directions of perpendicular to each other. The different vibration modes generated the elliptical motions and driving frictional force between the driving needle tip and rotor. The three solenoids were installed in three perpendicular directions to each other, which restricted the rotational direction with permeability rotor.
Driven by the different voltages and frequencies supplied, the ultrasonic motor would rotor the high or low rotational speed. The actuating process was detected with optical lever measuring method. The maximum angular velocity of each axis was: for X axis, at 63.6Vpp, 60 kHz, ωx reach 566 rpm, at 48.4Vpp, 60 kHz, -ωx reach242 rpm; also for Y axis, at 60.4Vpp, 61 kHz, ωy reach 1830 rpm, at 63.6Vpp, 60 kHz, -ωy reach 500 rpm; for Z axis, at 66Vpp, 62 kHz, ωz reach 443 rpm, at 63.6Vpp, 60 kHz, -ωz reach 365 rpm. This USM had high rotational speed and low operating voltage .In the future, we will be in the wide application of this USM.

並列關鍵字

USM ； Piezoelectric material ； Langevin transducer ； Optical lever ； Solenoid

參考文獻

[12] 楊晨暉, “雙層壓電式超音波馬達之研究,” 國立台灣大學機械工程研究

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