高分子光波導元件之研製

Design and Fabrication of Polymer Optical Waveguide Devices

許志瑋(Chih-Wei Hsu)

指導教授 ： 王維新

國立臺灣大學/電機資訊學院/光電工程學研究所/博士(2004年)

https://doi.org/10.6342/NTU.2004.01336

摘要

近年來高分子光波導技術在光通訊與光連接上的應用正如火如荼地展開，目前已經有利用高分子材料製作各式各樣主、被動積體光學元件。由於藍光雷射在光儲存與通訊上的應用，因此選擇用來製作光波導的高分子材料不僅要在紅外光波段有高穿透性，最好能在短波長藍光附近也有高穿透性。此外，用來製作光波導的高分子材料也要有好的熱穩定性。在本論文中，採用BCB高分子材料來製作波導並且量測其光學特性。
BCB脊狀波導的製作採用傳統微影法與乾式蝕刻製程。在一般製作高分子波導時，利用氧氣電漿來蝕刻材料。然而BCB分子結構內含有Si成分，需要利用混合氧氣與氟化物氣體當作蝕刻劑。因此，實驗中探討O2/CHF3對BCB蝕刻的特性。BCB脊狀波導在波長1.55

關鍵字

高分子波導 ； 光功率分離器 ； 積體光學

並列摘要

Recently polymer optical waveguide technology has been widely developed for optical communication and interconnection. A variety of passive and active integrated-optical devices have been successfully demonstrated using polymers. However, because of the potential applications of blue lasers in storage and communication, the candidate for polymer material should be transparent not only at infrared wavelength but also at ultraviolet wavelength. In addition, polymer used as optical waveguide material should have high thermal stability. In this dissertation, benzocyclobutene (BCB) polymer waveguides are fabricated and their performance is characterized.
BCB rib waveguides were fabricated by conventional photolithography and dry etching process. Conventionally, polymer can be etched in oxygen plasma. As BCB formulations are in a class of Si-containing polymers, a mixture of oxygen and fluorine-contained gases can be used as the etchants. In this work, BCB waveguides fabricated by O2/CHF3 etching are characterized. The measured propagation losses at 1.55

並列關鍵字

optical power splitter ； polymer waveguide ； integrated-optics

參考文獻

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