超潔淨閥流場及結構應力分析

Simulation of flow field and stress analysis of Ultra High Purity Valves

錢漢恩(Han-En Chien)

指導教授 ： 馬小康

國立臺灣大學/工學院/機械工程學研究所/碩士(2006年)

https://doi.org/10.6342/NTU.2006.01710

摘要

閥，是控制流體流量、壓力或流向之重要裝置，廣泛使用在民生及工業上，由於科技發展趨勢，使閥製品製作越來越精密，故其性能及特性已是重要的研究項目。
本研究內容主要分析探討兩種類型之超潔淨閥(Type A及Type B)其流場及結構。在流場方面，以套裝軟體CFD-RC，模擬在不同操作條件下，觀察閥體內部之速度、壓力及溫度分佈，並探討流量係數值，依據模擬結果將流道做最佳化設計。在結構方面則以套裝軟體ANSYS，模擬超潔淨閥在關閉時，金屬膜片受隔膜推塊推壓所產生之應力應變，並探討流場對於結構應力分析之影響。模擬分析結果，期望能給予國內製閥業者在流道及結構上一些實質建議與參考。

關鍵字

超潔淨閥 ； 膜片 ； 流場分析 ； 結構應力分析

並列摘要

Valve is an important device which controls the flow rate, pressure, and flow direction. The selection of valves depends on the purpose, environment, and design of the usage. Because of the development of science and technology, the valve products become more accurate, so its performance and characteristic have already been the important research projects.
The objective of this paper is to study two different types of the ultra high purity valves. In the analysis of flow field, the velocity, pressure, temperature distribution and the valve flow coefficient (Cv) were studied in details with a CFD-RC code. In the stress analysis, the stress distribution and deformation of diaphragms which were oppressed by the mandrel when shutoff were discussed with a ANSYS code. The results can be used as the optimum design basis of the ultra high purity valve.

並列關鍵字

Ultra high purity valve ； Diaphragm ； Flow field ； Stress analysis

參考文獻

[4] W. K. Schomburg, C. Goll, “Design optmization of bistable microdiaphragm valves”, Sensors and Actuators, pp.259-264, 1998

[5] L. O’Connor. ”microelectromechanical systems”, Mechanical Engineering, pp.40-47, 1992

[6] H. Jerman, ”Electrically-activated, normally closed diaphragm valves”, International Conference on Solid-State Sensor and Actuators, pp.1045-1048, 1991

[7] M. A. Huff, M.A. Schmidt, ”Fabrication packaging and testing of a wafer-bonded microwafer”, Proc. IEEE Solid State Sensor and Actuator Workshop, Hilton Head Island, SC, pp.123-127, 1990

[8] F. Yang, I. Kao, “Analysis of fluid flow and deflection for pressure - balanced MEMS diaphragm valves”, Sensors and Actuators, pp.13-21, 2000