This thesis presents recent approaches in the development of a Si-based waveguides system for submicrometer devices. A compact and efficient grating coupler for tilt-incident with respect to the vertical axis coupling between optical fibers and silicon photonic wires is proposed. One of the drawbacks of the high index contrast is the large mismatch in mode size and shape between fibers and silicon photonic wires. Hence, a slanted grating with a parallelogram shape is designed through the entire high-index waveguide core. Otherwise, the optical fiber is slightly tilted in order to prevent a reflection and its coupling efficiency will be analyzed. We use R-Soft to simulate various approaches and compare them with slanted grating, and finally we try to find the best solutions.