強韌控制器應用於真圓度機的設計與實現

Design and Realization of Robust Controller on the Stylus Probe For a Roundness Test Machine

李志輝(Chih-Hui Lee)

指導教授 ： 顏家鈺

國立臺灣大學/工學院/機械工程學研究所/博士(2005年)

https://doi.org/10.6342/NTU.2005.01759

摘要

摘要
真圓度機是建立精密儀器設計技術的必要量測儀器，其中負責量測的探針系統包括機械設計、組裝以及精密的伺服迴授，更是直接牽涉到系統整體量測的準確度。本論文針對真圓度機開發出由音圈馬達、彈簧剛片所組成的智慧型探針系統，並將之整合到真圓度機台的移動機構上，使探針系統能夠移動到最適當的測量位置，藉著應變規來偵測接觸力的大小，並透過力迴授控制法則來建立穩定的探針接觸力，同時以減振控制來壓制探針因摩擦工件表面所產生的振動，此時光纖位移感測器可測得探針的位置，再利用後部軟體分析，亦可反映出待測工件的表面粗糙度，水平度等定性資料。在控制器的設計方面，先對系統作不確定度分離後，藉由 合成理論設計出一具有強韌穩定性與強韌性能的控制器，透過實驗測試，此一強韌控制器除了可反映出工件表面輪廓外，其較傳統的PID控制器更可有效的減低突來的外部干擾，具有較佳的強韌要求。
關鍵字：真圓度機、μ合成、力迴授、強韌性、不確定度。

關鍵字

真圓度機 ； 力迴授 ； 強韌性 ； 不確定度

並列摘要

Abstract
This thesis presents the integration design of a roundness test machine using a novel
smart stylus probe with a high stiffness air-bearing. The high stiffness air-bearing
minimizes the effect of the spindle runout. The smart stylus design enables active
control on the stylus force. The stylus design is based on the mechatronics concept
and is made of relatively inexpensive parts. The force control is based on the strain
gauge output to control the stylus movement. An optical fiber sensor detects the stylus
position for the roundness measurement. The stylus force control enables active
adjustment of the system response. It is also possible to use a high bandwidth loop for
surface roughness measurement. This realization uses the µ-synthesis procedure to
implement the performance and the uncertainty specifications. The realization allows
the measurement of very small profile change without scratching the test object with
the active stylus. The roundness tester is also built for experimental verification.
Keywords：Stylus, roundness test machine, µ-synthesis, robust performance

並列關鍵字

stylus ； roundness test machine ； robust performance

參考文獻

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[4]. D.G. Chetwynd, X. Liu and S.T. Smith, “A controlled-force stylus displacement