高穩定度恆溫環境之研製

The Development of High Stability Temperature Environment

王祥名(Wang, Hsiang-Ming)

指導教授 ： 范光照

國立臺灣大學/工學院/機械工程學研究所/碩士(2007年)

https://doi.org/10.6342/NTU.2007.01971

摘要

有鑒於微奈米技術的蓬勃發展，無論是加工或是量測過程都需要一個穩定的環境，來提高精度與良率，而測量環境的控制是達到精密測量精度的重要基礎。由於物體都存在熱脹冷縮現象，當被測物體和測量儀器在一個溫度變動範圍很大的環境中工作，其測量誤差會非常的大，因而在本研究中預期開發一個高穩定度的恆溫環境來減少環境誤差。
本文章中提出高穩定度恆溫環境箱之研製，箱體外部溫度由水冷式冷氣控制，恆溫環境箱本身，使用電流控制半導體製冷晶片，搭配分離式箱體設計，隔離製冷元件產生的振動;利用Rake’s系統識別法得到控制系統模型，再使用Matlab Simulink模擬找出PID控制參數。
最後以National Instrument之LabVIEW與DAQ介面卡搭配處理電路，完成恆溫系統程式之設計。由實驗結果顯示，恆溫箱內的溫度可以被控制在欲達到的溫度，且達到穩定狀態後，溫度跳動範圍在20℃±0.008℃以內，達到高穩定度恆溫環境的要求。
關鍵詞: 半導體製冷晶片、Rake’s系統識別法、分離式箱體設計、LabVIEW、Matlab Simulink

關鍵字

半導體製冷晶片 ； Rake’s系統識別法 ； 分離式箱體設計 ； LabVIEW ； Matlab Simulink

並列摘要

In the progress of micro/nano technology, many miniature parts with ultrahigh precision requirement are produced; therefore the high precision temperature control is very important in the modern precision measurement system. If the measurement is proceed in a environment which vary widely in temperature, the measurement error will be large. In order to minimize these environment errors, this research develops a high stability temperature environment chamber.
In this report, we propose to build a high stability environment chamber. Outside the chamber temperature is controlled by the air conditioning. The environment chamber uses the electric current to control a thermoelectric cooling chip. The separation design of chamber and cooling system is able to reduce the vibration. The system identification employed Rake’s system identification method to obtain the system model so that the suitable PID parameters could be acquired through simulation of Matlab Simulink .
The temperature controlling program is accomplished with electrical cuircuit , LabVIEW, and Data Acquisition (DAQ) cards produced by National Instrument. The results showed that the temperature can be controlled at the set point and the temperature vibration within 20 degree up and down 0.008℃ in the steady state. It can achieve the goal of high stability temperature environment.

Keywords: thermoelectric cooling chip , Rake’s system identification method,
separation design、LabVIEW、Matlab Simulink

並列關鍵字

thermoelectric cooling chip ； Rake’s system identification method ； separation design ； LabVIEW ； Matlab Simulink

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