光子晶體元件特性模擬與光子晶體製造技術研究

Characteristic Simulation and Fabrication Technique of hotonic Crystal Structure

陳培元(Pei-Yuan Chen)

指導教授 ： 林清富

國立臺灣大學/電機資訊學院/電子工程學研究所/碩士(2006年)

https://doi.org/10.6342/NTU.2006.10380

摘要

摘要

1980 年代起，新名詞－光子晶體迅速竄紅於光電，電子和材料界﹔十幾年之後，其技術日趨進步。本論文將以光子晶體為主角，說明其原理，電磁作用，製造方式，波導，以及光子晶體的用途等等。
光子晶體在光與電波磁波中，主要的特性是由於不同介電常數的材料週期排列所成的結構，其規則排列週期寬度約為可見光至紅外光波長的1/4~1/2 （約80~800nm）。目前學界在光子晶體製作方面的相關研究，可概分為兩種製作屬性上完全相異的製程技術：
(一) 奈米微影技術(Nanolithography)。
(二) 堆疊技術(Self-Assembly)。
本論文所探討的製程亦包含以上兩者﹔(1)以曝光機定義線寬200nm之圖樣於已旋塗光阻之矽晶片上，再施以RIE技術後，得到週期性的孔隙矽晶片。(2)以乙醇，銨水，TEOS，DI自行合成粒徑100nm至200nm之SiO2粒子，並將之形成堆疊的光子晶體。期待這樣子的結構在未來能夠改良各種發光光源。

關鍵字

光子晶體

並列摘要

Abstract

Since 1980s, Photonic Crystal rapidly becomes very popular for
optoelectronics and is widely studied as photonic materials. In this thesis, we will describe the principle of photonic crystals, their manufacture technology, their wave-guiding and electromagnetic function, and their applications.
The main characteristic of electromagnetic wave in Photonic Crystal is the periodic structure of different dielectric constant. The width of regular period is from visible light to infrared.(80~800nm). The research in Photonic Crystal fabrication could be separated into two different fabrication techniques:

(1) Nanolithography
(2) Self-Assembly

This thesis research fabrications above: (1) Spinning upon photoresist on Si wafer and defining 200nm line width by deep UV aligner. We get periodic hole in Si wafer using RIE technique. (2) Synthesizing SiO2 particles with C2H5OH, NH4OH, TEOS, DI water. The diameter of particles is about 100nm to 200nm. Use the SiO2 particles to fabricate Self-Assembly Photonic Crystal. We look forward to this structure to improve various light sources.

並列關鍵字

Photonic Crystal

參考文獻

[1] J. D. Joannopoulos, R. D. Meade, J. N. Winn, Photonic Crystals: Molding the Flow of Light (Princeton University Press, 1995).

[2] E. Pennisi, “Naturalist's Surveys Show That British Butterflies Are Going, Going...,” Science, vol. 303, p.1747, (2004)

[6] K. Sakoda, Optical Properties of Photonic Crystals, (2001)

[7] J. D. Joannopoulos, Handbook of photonic Band Gap Materials, (1993)

[8] Steven G. Johnson, J.D. Joannopoulos Designing synthetic optical media: photonic crystals. Acta Materialia vol.51 p.5823, (2003)