奈米碳管叢之高溫溫度感測器

Carbon Nanotube Forest for Wide Range Temperature Sensor

鄒永瀚(Yung-Han Tsou)

指導教授 ： 張所鋐

國立臺灣大學/工學院/機械工程學研究所/碩士(2008年)

https://doi.org/10.6342/NTU.2008.02174

摘要

本實驗將以奈米碳管叢為核心元件設計新的溫度感測裝置，並且將感測器應用在較大的溫度範圍。以化學氣相沉積法成長不同幾何外型之奈米碳管叢，以機械力方式將奈米碳管叢轉印至不導電基板，利用掃描式電子顯微鏡觀察奈米碳管叢幾何外型，進行奈米碳管叢溫度與電阻曲線圖量測時係利用三段式高溫爐為加熱工具，在加溫過程中以人工方式記錄溫度變化，並且以半導體參數量測儀(Agilent HP 4156C)紀錄奈米碳管叢的電阻值，最後計算奈米碳管叢室溫下之電阻率，以及奈米碳管叢整體之溫度電阻係數(TCR)。

實驗後發現，奈米碳管叢室溫之側向電阻率為1469.067 mΩcm，並且其電阻與溫度之間有密切的關係，而將奈米碳管叢進行前處理之後R(T)/Ro曲線將趨於同一條，證明奈米碳管叢適用於溫度感測器，而其TCR平均為-0.0671%/℃，且奈米碳管叢的TCR與幾何外型無關，奈米碳管叢溫度感測器在150~550℃之間有較好的靈敏度。

關鍵字

奈米碳管叢 ； 溫度感測器 ； 溫度電阻係數 ； 側向電阻率 ； 高溫爐

並列摘要

Carbon nanotube (CNT) forest is taken as the central element of a new temperature sensor device in this thesis and we measure the lateral resistance of CNT forest in the range of temperature measurement is from 24~800℃. First of all, the CNT forests are grown by CVD (Chemical Vapor Deposition) in different geometric shapes and are bonded on nonconducting substrates. After moved, the length、width、height of CNT forests are observed by SEM (Scanning Electron Microscope), then the device is heated by using three-zone temperature furnace. In the period of heating, the temperature and lateral resistance of CNT forest are recorded by hand and Semiconductor parameter analyzer (Aligent HP 4156C). Finally the room temperature resistivity and TCR (Temperature Coefficient of Resistance) of CNT forest are calculated.
It is obtained that the lateral room temperature resistivity of CNT forest is about 1469.067 mΩcm and there is a close relation between the temperature and resistance of CNT forest and the curves of R(T)/Ro seem to be the same after the CNT forest is pretreated .The mean TCR of CNT forest is -0.0671%/℃ and has no relation with the geometric shapes of CNT forest and the CNT forest temperature sensor is compatible to be used in 150~550℃.

並列關鍵字

CNT forest ； temperature sensor ； TCR ； lateral resistivity ； furnace

參考文獻

[1]Dresselhaus, M.S.; Dresselhaus, G.; Eklund, P.C.

Fullerenes and Carbon Nanotubes, Academic, San Diego,

[2]Sumio Iijima, “Helical microtubules of graphitic

carbon,” Nature, 354, 56,1991

“Multiwalled Carbon Nanotubes by Chemical Vapor