壓電厚膜氣膠沉積製程設備之連續噴塗系統開發

Development of Continuous Spraying System for Piezoelectric Thick Film Aerosol Deposition Apparatus

莊芃鍇(Peng-Kai Chuang)

指導教授 ： 王昭男

共同指導教授 ： 吳文中(Wen-Jong Wu)

國立臺灣大學/工學院/工程科學及海洋工程學研究所/碩士(2022年)

https://doi.org/10.6342/NTU202202817

摘要

壓電氣膠沉積製程作為微機電（MEMS）壓電元件製作重要的一環，改良其製程設備以獲得更佳的成膜品質及製程效率，可為壓電材料的應用帶來更多的自由度與可能性。本研究中提出一個新的氣膠產生系統，包含混合室及補粉器，新設計之混合室得以提高固氣混合之效率及品質；補粉器以穩定且連續的固定速率對混合室補充鋯鈦酸鉛（PZT）粉末，以維持氣膠產生之效率且免去舊製程中停機補粉之步驟，實現更高的連續噴塗時長，有效節省不少時間，提高單位時間的產率。
使用本研究所提出之氣膠產生系統所製備出厚度約10 μm的壓電厚膜，經鐵電分析量測獲得，在300 Vpp的三角波條件下具備殘餘極化量為15.14 μC/cm2、矯頑電場為2.68 MV/m，相較舊系統擁有較高的飽和極化量、殘餘極化量，較小的矯頑電場，介電損耗由11 %降至7.7 ¬%。由量測數據顯示改良後的製程設備所製備出之壓電膜擁有較優異之壓電特性。

關鍵字

氣膠沉積法 ； 鋯鈦酸鉛 ； 壓電厚膜 ； 氣膠產生系統 ； 流體化床 ； 震動給料機 ； 白努力定律

並列摘要

Piezoelectric aerosol deposition (AD) plays a significant role in manufacturing piezoelectric micro-electromechanical systems (MEMS). To make piezoelectric materials more flexible in different applications, we refine the current AD apparatus to achieve higher efficiency and better film quality. We propose a new aerosol generation system composed of a self-designed mixing chamber and an innovative powder feeder. This mixing chamber boosts not only the quality but also the efficiency of powder fluidization. Our uninterrupted powder feeder reaches a longer spray time and prevents the drop in efficiency during aerosol generation. Since this novel powder feeder can refill the lead zirconate titanate (PZT) powder automatically. The system can eliminate the interruption of re-packing powder compared to previous procedures.
The 10μm PZT thick film, produced by our aerosol generation system, attains 15.14 μC/cm2 in remnant polarization (Pr) and 2.68 MV/m in coercive electric (Ec) field through the ferroelectric analysis under the condition of 300 Vpp triangular wave. The products of the proposed system lead to greater values in saturated polarization (Ps) and remnant polarization (Pr) than those of the former designs. Besides, the products have relatively small values in coercive electric (Ec) field. Furthermore, we reduce the dielectric loss of the thick film from 11% to 7.7%. With the experimental data, our proposed aerosol generation system produces piezoelectric films with better piezoelectric properties.

並列關鍵字

aerosol deposition method ； piezoelectric thick film ； PZT ； aerosol generator ； fluidized bed ； vibration feeder ； Bernoulli's principle

參考文獻

REFERENCE

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