平面磁浮平台系統模擬與控制器設計

Simulation and Controller Design of Magnetic-levitated Platform System

林耿賢(Keng-Hsien Lin)

指導教授 ： 陳永耀

國立臺灣大學/電機資訊學院/電機工程學研究所/碩士(2004年)

https://doi.org/10.6342/NTU.2004.10264

摘要

高科技產業持續發展，尤其是半導體製程之精密度須不斷提昇，因此IC製造場所必須保持乾淨、無干擾的狀態，使得製程設備之無塵要求亦不斷增加。本論文針對工業發展趨勢，進行平面磁浮系統之智慧型複合控制方法研究。主要之目標在以智慧型複合式控制方法達成平面磁浮精密定位之任務。
由於在磁浮系統中，任一個磁性物體在靜態磁場中都無法得到一個穩定的狀態，除非是加上適當的控制才能達到所要求的成果，因此磁浮平台系統必須根據回授控制原理，用電流產生磁場來控制其不穩定的天性。本論文藉著建立準確的磁浮動態模擬系統，嘗試各種載具及控制器的設計，以期達到控制載具懸浮和運動的目標。研究重點為：
1. 藉由動態模擬系統分析載具的運動行為和磁浮系統的特性
2. 嘗試各種載具及控制器的設計

關鍵字

平面磁浮 ； 動態模擬 ； 複合式控制

並列摘要

High technology develops continuously. So the precision of semiconductor must promote continuously especially. This makes the requirement for ducting off from semiconductor foundry increases constantly. The thesis to this industrial trend has developed the intelligent hybrid control of the level magnetism float system. The goal is that using the intelligent hybrid control method to reach the task of orientation in the Magnetic-levitated system.
Because in the Magnetic-levitated system, any magnetic object is all unable to get a steady state in the static magnetic field, unless add proper control and could reach the achievement required , the Magnetic-levitated system must be according to tickling the principle of controlling that the magnetism floats, produce the magnetic field to control its unstable natural instincts with the electric current. This thesis is making use of the simulation system of the attitude of setting up accurate magnetism to float, try the designs of different carrier and the controller , is in the hope of reaching the goal with suspending and movement of carrier by control. The thesis can be summarized as:
1. Analyzes characteristic of the the Magnetic-levitated system and the dynamic behavior by the dynamic simulation system.
2. Try the designs of different carrier and controller.

並列關鍵字

Magnetic-levitated ； Hybrid control ； dynamic simulation

參考文獻

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