挫曲式雙穩態壓電能源擷取器於旋轉環境之研究與實作

Bistable buckled piezoelectric energy harvester applied in rotational energy harvesting system

簡瑞達(Jui-Ta Chien)

指導教授 ： 吳文中

國立臺灣大學/工學院/工程科學及海洋工程學研究所/碩士(2020年)

https://doi.org/10.6342/NTU202000645

摘要

為了達成智慧感控系統而代換機台將會產生巨大成本，因此於機台上加裝感測器後藉由能源擷取器達成自供電系統，再以無線傳出回收資料為更佳解。本研究將著重於壓電能源擷取器設計與製造，並量測其輸出表現。
因廣泛分布且穩定選擇以旋轉環境來擷取能量。旋轉時重力的方向相對改變，讓壓電元件產生形變並輸出。考量轉速可能因工業需求改變，本研究選擇能適應較大旋轉範圍的挫曲式雙穩態壓電能源擷取器。其中壓電材料則採用因良好壓電特性被普遍採用的鋯鈦酸鉛(PZT)，再藉由團隊過去最佳化的氣膠沉積法及金屬微機電製程來製作元件。
論文首先藉由能量法以及假設模態法推導壓電挫曲樑能量擷取器之模型，並用Matlab分析單樑不同厚度以及對稱與非對稱跳躍時的輸出表現。在藉由實驗設計量測不同參數的元件。實驗結果顯示，由30 um不鏽鋼所製成的壓電元件於10 rpm至310 rpm之開迴路電壓達3 V且於130 rpm至310 rpm之輸出功率達1 uW。其中最高輸出功率達1.29 uW。

關鍵字

鋯鈦酸鉛 ； 能量法 ； 旋轉式能源擷取器 ； 雙穩態能源擷取器 ； 挫曲樑

並列摘要

It is huge cost to replace machines to improve the efficiency as Cyber-Physical Systems. Therefore, self-power system with sensors, wireless transmission devices and a energy harvester will be a better solution. This research will focus on the design and manufacture of piezoelectric energy harvester and measure the output performance.
Rotational environment has the advantages of wide distribution and stability, and the direction of gravity is relatively changed under rotating environment. Considering that the rotating speed will be different while producing, this research will focus on a bistable buckled piezoelectric energy harvester. The piezoelectric material is lead zirconate titanate (PZT) which has good piezoelectric properties. The PZT layers will be fabricated by aerosol deposition method optimized by our group, and the devecies will fabricated by mental-MEMS process.
The model analysis shows the model of power harvesting system derived from energy method and assumed-mode method. And this paper compares the differency of single beam output performance between 10 um stainless steel and 30 um stainless steel and compares the output performance between an asymmetric mode or symmetric mode as the buckled beam is snapped through. The experimental result shows that the device made of 30 um stainless steel shows the open circuit output voltage of 3 V from 10 rpm to 310 rpm, output power higher than 1 uW between 130 rpm to 310 rpm and the maximum output power 1.29 uW.

並列關鍵字

PZT ； energy method ； roataional energy harvester ； bistable energy harvester ； buckled beam

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