一種壓電作動器之分析與設計

Analysis and Design of a Piezoelectric Actuator

丘國鋒(Kok-Foong Hew)

指導教授 ： 薛文証

國立臺灣大學/工學院/工程科學及海洋工程學研究所/碩士(2005年)

https://doi.org/10.6342/NTU.2005.02508

摘要

文中利用Mason等效電路及傳輸矩陣推導分析換能特性之工具Smith chart、Return Loss及Transducer Loss。再以Matlab程式數值模擬及分析各參數及黏著層對壓電換能特性的影響，同時也討論匹配電路之設計。 本文之數值模擬是以產生基體聲波波長為1.064μm之元件作為討論之對象，分別對三個基體材料做分析，並找出其中最佳之設計。
最後，簡單地提出一壓電元件之設計流程，以提供有系統的壓電元件最佳化設計方法。

關鍵字

壓電 ； 換能器 ； 作動器 ； 匹配 ； 等效電路 ； 傳輸矩陣 ； 黏著層

並列摘要

The primary aim of the research is to provide a comprehensive design process of the piezoelectric device. This simulation is based on Mason equivalent circuit model and transfer matrix method. Besides, the Smith chart, Return Loss and Transducer Loss have been carried out.
The theory is applied to a piezoelectric device which excite 1.064μm acoustic wavelength to propagate in the substrate, three different materials of substrate have been chosen in the discussion. By using the Matlab simulation, several important factors including the influence of the bonding layer that affects the performance of piezoelectric transducers have been studied. Furthermore, the designs of matching network will be discussed.
Finally, a piezoelectric device’s design procedure to offer a systematic way for the optimum designs of piezoelectric devices is presented.

並列關鍵字

Piezoelectric ； Transducer ； Actuator ； Matching ； Bonding ； Transducer loss

參考文獻

[1]. G. Kossoff, “The effects of backing and matching on the performance of piezoelectric ceramic transducer”, IEEE Trans. on Sonics and Ultrasonics, Su-13, 20-31, 1966.

[2]. E. K. Sittig, “Effect of bonding and electrode layers on the transmission parameters of piezoelectric transducers used in ultrasonic digital delay lines”, IEEE Trans. on Sonics and Ultrasonics, Su-16, 2-10, 1969.

[3]. A. H. Meitzier and E. K. Sittig, “Characteristic of piezoelectric transducer used in ultrasonic devices operating above 0.1Ghz”, Journal of Apllied Physics, Vol.40, 4341-4352, 1969.

[4]. T. M. Reeder and D. K. Winslow, “Characteristics of microwave acoustic transducers for volume wave excitation”, IEEE Trans. on Microwave Theory and Techniques, MTT-17, 927-941, 1969.

[5]. H. F. Tiersten, “Electromechanical coupling factors and fundamental material constants of thickness vibrating piezoelectric plates”, Ultrasonics, 19- 23, 1970.