抗反射及親疏水效應和一維奈米玻璃結構之互動分析與驗證

Analysis and Performance Verification of One-Dimensional Nano-glass Structures Possessing Both Anti-reflective & Hydrophobic-Hydrophilic Properties

張德威(Te-Wei Chang)

指導教授 ： 李世光

國立臺灣大學/工學院/工程科學及海洋工程學研究所/碩士(2007年)

https://doi.org/10.6342/NTU.2007.02704

摘要

經由此本論文的系列研究，周期性漸變奈米結構表面在理論及實驗方面均證實其結合抗反射和親疏水性質之可行性。雖然至今此結構製作在透明基板的性質並未明瞭，但是此一設計主要之應用方面包括太陽能電池及戶外顯示面板之封裝等皆是以透明基板為基礎，因此設計和製作一維奈米結構於玻璃基板上乃成為本論文之主軸。
在抗反射及親疏水性質中，分別利用嚴格耦合波理論(RCWA)模擬及數值分析來設計奈米結構之外形，之後藉由電子束微影(e-beam lithography)和反應離子蝕刻(RIE)技術來定義以及轉印圖形至玻璃基板上，製程步驟完成後，經由量測證實此一設計同時具有抗反射及親疏水兩大性質。
除此之外在本研究中，發現許多有趣而且至今尚未完全明瞭之親疏水現象，包括異質性效應、非等向性現象和局部疏水性質，在此論文中將分析及驗證形成這些現象之初步原因，根據討論可知結構之幾何性質對液體之接觸角和擴散性質會有影響，此一概念發現在軟性電子中噴墨製程技術的液滴控制上將可有相當程度的應用潛力。

關鍵字

親疏水 ； 抗反射 ； 蓮花效應 ； 奈米結構 ； 電子束微影製程 ； 液滴控制

並列摘要

After a series of research, feasibility of using periodic gradient nano-structured surface to integrate both the anti-reflection and the hydrophobic properties was proved both theoretically and experimentally. Up to this point, the underlying reason for these properties on transparent material is not completely clear even though most of the significant applications of this design are based on transparent materials, which includes package of solar cells and outdoor display panel, etc. Design and fabrication of one-dimensional nano-structures on glass substrate was thus adopted at the main platform to pursue basic understandings.
Rigorous coupled-wave analysis (RCWA) and numerical computation were applied here to design the desired structure for anti-reflection and hydrophobic-hydrophilic properties respectively. Then definition and transferring of pattern are carried out by electron beam lithography and reactive ion etching (RIE) method respectively. After experimental confirmations, the newly designed structure was found to possess both anti-reflection and hydrophobic-hydrophilic properties.
Besides that, some interesting but not clearly understood phenomena of wetability including heterogeneous effect, anisotropic effect and localized hydrophobic state have been found, analyzed and verified. According to these discussions contact angle and spreading property of liquid can be affected by geometry of surface structures. This idea may have great potential in droplet controlling of inkjet printing technique in flexible electronics in the future.

並列關鍵字

Anti-reflection ； Super-hydrophobic ； nano-structure ； Lotus effect ； electron beam lithography ； droplet control

參考文獻

1 A. Duparre, M. Flemming, J. Steinert et al., "Optical coatings with enhanced roughness for ultrahydrophobic, low-scatter applications," Applied Optics 41 (16), 3294-3298 (2002).

2 W. Barthlott and C. Neinhuis, "Purity of the sacred lotus, or escape from contamination in biological surfaces," Planta 202 (1), 1-8 (1997).

3 R. N. Wenzel, "Resistance of solid surfaces to wetting by water," Industrial and Engineering Chemistry 28, 988-994 (1936).

4 A. B. D. Cassie and S. Baxter, "Wettability of porous surfaces," Transactions of the Faraday Society 40, 0546-0550 (1944).

5 L. M. Lacroix, M. Lejeune, L. Ceriotti et al., "Tuneable rough surfaces: A new approach for elaboration of superhydrophobic films," Surface Science 592 (1-3), 182-188 (2005).