二維結構之微型能量擷取器設計研製

Design, Fabrication and Evaluation of 2D Structure Piezoelectric MEMS Generator

林順區(Shun-Chi Lin)

指導教授 ： 吳文中

國立臺灣大學/工學院/工程科學及海洋工程學研究所/碩士(2009年)

https://doi.org/10.6342/NTU.2009.02886

摘要

本篇論文主要製作能從環境中擷取機械振動能並且轉換成電能的微型能量擷取器，此擷取器主要透過d31壓電模式作為能量轉換的方式，所謂的d31壓電模式是在壓電層PZT上下製作電極層作為能量輸出端，並且透過微機電製程技術設計並製作二維結構作為能量轉換裝置，而壓電層PZT主要是利用沉積效率高且低溫製程的氣膠沉積法進行PZT層的製作。實驗結果成功製作出d31壓電模式的二維結構微型能量擷取器，並且就其能量擷取進行輸出電壓對阻抗與輸出功率對阻抗的量測，另外也就輸出電壓對加速度及輸出功率對加速度的數據進行量測分析；量測結果在共振頻率為110.2Hz且加速度1.6 g的環境下，單支樑負載電阻時，其最大輸出功率為12.44 nW此時輸出電壓為82.27 mV；另外在共振頻率為110.5Hz且加速度1.6 g的環境下，並聯每支樑且負載電阻時，其最大輸出功率為13.09 nW此時輸出電壓為73.09 mV。

關鍵字

微機電 ； 壓電材料 ； 氣膠沉積法 ； 懸臂樑 ； 能量擷取

並列摘要

This dissertation presents the development of a piezoelectric MEMS generator that has the ability to scavenge mechanical energy of ambient vibrations and transform it into useful electrical power. The piezoelectric MEMS generator is a 2D structure type transducer made with silicon process and can transform mechanical energy into electrical energy with piezoelectric PZT layers. The d31 mode device is the PZT layer sandwiched in between laminated electrodes. A home-made PZT deposition machine using aerosol deposition method was used to fabricate the high-quality PZT thin film efficiently. The experimental results show that single branch of the device has maximum output power of 12.44 nW with 82.27 mVP-P output voltage excited at its resonant frequency, 110.2 Hz under 1.6 g acceleration level. The device has maximum output power of 13.09 nW with 73.09 mVP-P output voltage measured at its resonant frequency 110.5 Hz under 1.6 g acceleration.

並列關鍵字

MEMS ； piezoelectric material ； aerosol deposition ； cantilever beam ； power harvesting

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