微細元件創新性製造法與線上裝配技術之研究

Study On The Novel Manufacturing Process and On-the-Machine Assembly Technology of Micro Parts

林常盛(Chang-Sheng Lin)

指導教授 ： 廖運炫

國立臺灣大學/工學院/機械工程學研究所/碩士(2004年)

https://doi.org/10.6342/NTU.2004.02131

摘要

本論文主要目的在研究微細元件的製作與裝配技術。首先為設計一新式放電微線切割機構，配合以開發出之微加工機，製作微細驅動件。再使用微放電加工製作特殊螺旋造型桿件，發展一螺旋緊配技術，並將文中製作之微小驅動件做線上微組裝。
製作出之微線切割機構經測試結果，可使用50μm以下之微細線，可快速調整細線傾斜角以加工具錐度之工件，並可由電磁控制細線張力，方便且穩定性高。以微細線切割技術搭配微加工機第四軸分度，成功的製作出微齒輪、微斜齒輪、微葉片輪、微螺桿等元件，其中微斜齒輪是目前其他微加工技術難以製作之特殊造型零件。在微組裝方面，開發出具有螺旋造型之錐桿，對基板做相對旋轉放電之微細緊配接合技術，經測試發現具有相當良好的接合強度。再配合微放電加工成功的在線上完成微小驅動件的組裝。此種組裝方式對位精準，步驟簡單，可望成為微系統製造自動化的一關鍵技術。

關鍵字

微斜齒輪 ； 微螺桿 ； 微齒輪 ； 線上微組裝 ； 微放電、微線切割

並列摘要

The objective of this thesis is to study the manufacturing and assembly technologies of micro parts. A novel micro Wire-cutting mechanism is designed. By using this mechanism, it is found that a thin wire with diameter thinner than 50 µm can be used. The wire angles can be adjusted rapidly for slant cutting. Furthermore, the wire tension can be adjusted by electromagnetism that leads to stable cutting. Incorporating with the micro wire cutting technology and the indexing ability of the spindle, work pieces such as micro gear, micro turbine and micro screw can be produced. In particular, the micro bevel gear, which has special appearance and is very difficult if not impossible to be made by other micro fabrication technologies, is made satisfactorily. In micro assembly technology, a screw typed pin is produced, and the screw tight fit technology is developed. Testing has shown that it has good joint strength. By using micro-EDM, the on-the-machine assembly technology of micro transmission parts can be accomplished successfully. This assembly technology is very simple and only a few steps are required. But high positioning accuracy can be maintained. As a result, it might become one of the key technologies in automatic micro system manufacturing in the future.

並列關鍵字

micro gear ； micro wire cutting ； micro assembly ； micro bevel gear ； micro screw ； micro EDM

參考文獻

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