氣動式矽膠薄膜微閥門之研製

A Study of Pneumatic Microvalve with Polydimethylsiloxan Membrane

李蕢至(Kuei-Chih Lee)

指導教授 ： 王安邦

國立臺灣大學/工學院/應用力學研究所/碩士(2005年)

https://doi.org/10.6342/NTU.2005.02899

摘要

為了使生醫檢測晶片能獨立具備內部流體傳輸，本研究之目的在於利用微機電系統製程技術，設計製作生醫檢測晶片中的微流體傳輸控制元件：微閥門。利用薄膜作動的概念，設計及製作一氣動式薄膜微閥門，藉由薄膜軟韌的特性，施加壓縮空氣驅使薄膜致動，致動的薄膜即構成了微閥門結構。氣動式薄膜微閥可阻絕微流體之流動，並且可來用控制不同試劑在微流道中之切換，同時利用氣壓大小之控制，可以做為流量調節閥之用。

本研究之微閥門的設計製作是利用SU-8 2050負型厚膜光阻製作微流道母模，利用軟式微影製程技術，以二甲基矽氧烷做為製程材料。，其具有可塑性及光學檢測性極佳的優點。在設計上，為提高良率，電磁閥係以外接方式來控制，以此方式製作而成的微閥門，此可快速批次量產，減少各別檢測篩選、大幅降低成本的目的。

關鍵字

薄膜作動 ； 氣壓驅動 ； 軟式微影技術

並列摘要

In this paper, a pneumatic microvalve with a polydimethylsiloxan membrane (PDMS) has been successfully made by the method of replica molding. Polydimethylsiloxane has been found exceptional mechanic property, including high elongation and good sealing. To make the microvale, the SU-8 negative photoresisit with the thickness of 50μm is produced by the method of exposure and develop. Then PDMS is poured on the SU-8 mold and peeled off after solidifying. Finally, the structure of PDMS combines with another by the treating of air plasma. An integrated normally open valve with a PDMS membrane has been tested. For a liquid flow, 4psi valve pressure is required to close the valve at the flowrate of 471.24 μl/min. For a air flow, 4psi valve pressure is needed to stop the air flow at inlet pressure of 4psi.Moreover, there is no leakage when the valve is closed pneumatically. Beside that, a liquid-bubble flow generator which combines the designed microvalve has been fabricated and performed. A microvalve plays a important role in a microfluidic system. The valve in this paper can be produced and combined with another component easily.

並列關鍵字

pneumatic microvalve ； polydimethylsiloxan membrane ； soft lithography

參考文獻

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