Anodic aluminum oxide (AAO) is a typical self-organized structure with nano-hole arrays. It has many application advantages, compared to e-beam lithography and focus ion-beam etching. In this thesis, we present the procedures for fabricatng AAO of different sizes and interpore distances using phosphoric acid and sulfuric acid as electrolytes. Then, the SiO¬2 nano-pore arrays of different interpore distances are fabricated using AAO as an etching mask. We discuss how to fabricate AAO on p-type GaN template. Then, we roughen the surface of a light-emitting diode (LED) using AAO as an etching mask. It is expected the light extraction of the LED can be enhanced. Next, the metal nano-particles are fabricated using AAO as an evaporation mask. The SP characteristics of Ag, Au, Cu nano-particles on undoped GaN templates are investigated from UV-visible transmission spectroscopy.