擾動響應分解於減震平台之設計及控制應用

The Design and Control of an Anti-vibration Platform using Disturbance Response Decoupling Techniques

曹祐嘉(Yu Chia, Tsao)

指導教授 ： 王富正

國立臺灣大學/工學院/機械工程學研究所/碩士(2008年)

https://doi.org/10.6342/NTU.2008.02972

摘要

本論文將討論減震平台的設計與控制。隨著半導體製程的進步，對於工作環境的震動要求也相對地提高。一般而言，減震平台需要克服的震動來源主要有兩方面，一為外界環境產生的干擾，二為機體本身產生的震動。而隨著控制方式的不同，減震控制又可粗略分為被動式控制以及主動式控制兩種。
對減震系統來說，想要隔絕來自於環境以及機體的震動，就必須要分別採用 “軟” 以及 “硬” 的隔震設定。針對這兩項互相抵觸的性能指標，本論文將應用英國劍橋大學於2001年所提出的控制理論－擾動響應分解(Disturbance Response Decoupling, DRD)，結合被動式及主動式的減震結構，以及訊號回授及濾波器的設計，將來自地面的震動位移及來自機體的擾動受力分開控制。其中被動式的部分用以隔離地面的擾動位移，且可使用半主動式的控制方法來增進其抑震能力；而主動式控制的部分，本論文使用音圈馬達為致動器，透過濾波器的設計，使得控制訊號僅會被桌面擾動力所激發，進而設計控制器來增進對桌面擾動力的抑震能力，而不會改變對地面擾動的減震性能。從模擬及實驗結果顯示，我們提出的減震控制架構，確實能達到預期的目標。

關鍵字

擾動響應分解 ； 廣義雙層減震架構 ； 控制器參數化 ； 音圈馬達 ； 被動式結構 ； 主動式結構

並列摘要

This thesis emphasizes on the design and vibration control of an optical table. Due to the resolution requirement of semiconductor processing, vibration control of the system is increasingly important. Generally speaking, two kinds of disturbances, namely load disturbances from the machine and floor disturbances from the environment, need to be considered in this system. To achieve it, both active and passive control algorithms can be utilized to reduce the system vibrations by anti-vibration tables to insulate disturbances. However, the controller design of abti-vibration table is complicated due to the conflicting requirements for the two disturbances. Therefore, this thesis applies a newly developed technique, named Disturbance Response Decoupling (DRD), to deal with the performance requirements simultaneously. Applying this theorem, passive isolators are applied to reduce the floor disturbances while active isolators can be used to suppress the load disturbances. From the simulation and experimental results, the design is deemed effective.

並列關鍵字

Disturbance Response Decoupling ； generalised structure ； controller parameterization ； voice coil motor ； passive isolators ； active isolators

參考文獻

[15] 徐茂盛，慣質觀念之實現及在建築物減震之應用，2005年六月

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