- 學位論文
無閥門微幫浦之擋體幾何設計與性能分析
Geometric Design of Obstacles and Analysis of Pumping Performance of Valveless Micropump
摘要
隨著半導體製程技術逐漸進步，而生醫檢測的目標是將檢測系統微小化，讓整個生醫檢測系統整合至單一晶片上，而微幫浦扮演重要的角色，做為一個檢測用的微幫浦，其適合的流量為20-30 uL/min。根據實驗的結果，改變擋體式無閥門微幫浦中的擋體尺寸，可以改變其操作頻率，也可以改變流量大小。與前人研究做比較，擋體角度10度的type A和擋體角度15度的type B皆在驅動電壓40V之下，最佳操作頻率從前人研究的3.1KHz，降至1.1KHz，其流量也從155.85 uL/min降至56.78 uL/min和26.18 uL/min，不論在操作頻率和流量上，皆比前人研究更適合應用於生醫檢測晶片。本研究更針對單一擋體對微幫浦性能做探討，若將微幫浦整體的性能定為100%，由下游的擋體可約提供70%，上游的擋體可約提供剩餘的30%。單一擋體之微幫浦在高頻下會有逆流現象產生，其裝置可藉由改變壓電片驅動電壓和操作頻率，就可以操控此擋體式無閥門微幫浦的淨流量大小及方向。
並列摘要
With continuous progress of semiconductor technology, the objective of biomedical detection was miniaturized. The biomedical detecting system was integraled to a chip, and Micropump play a important element in detecting system which provided 20-30 uL/min suitably. Based on the experimental result, the operation frequency and flow rate of micropump were effected by geometric design of obstacle. Compare with Tu(2005), the optimum volume flow rates of typeA and typeB decreased to 56.78 uL/min and 26.18 uL/min with driving voltage of 40V and working frequency of 1.1KHz. The operation frequency and flow rate of micropump were suitable for biomedical detecting chip. In this study, we discussed pumping performance of single obstacle micropump more. The downstream obstacle provided 70% rectified performance in comparison with micropump with two obstacles, and the upstream obstacle provided surplus 30%approximately. The reverse flow micropump with single obstacle happened at high operating frequency. The flow direction could be control by varying operating frequency and driving voltage.