聚二甲基矽氧烷製備之高形變可形變面鏡運用於光學變焦模組

一般傳統的變焦與自動對焦系統是由馬達驅動透鏡位置來造成效果，這種方式通常需要較大的空間並且有較大的功率損耗，在這篇論文裡，我們設計一款反射式的兩倍變焦系統，反射式光學除了具有低色散的特性之外，還可以透過折光的方式來使空間運用上更有效率。對於現在強調輕薄短小的光學系統來說，如何有效運用反射式光學在光學設計裡面，是很重要的課題。我們利用有機可形變面鏡(organic deformable mirror)擔任系統裡的反射原件，它使用聚二甲基矽氧烷(PDMS)來製做一具高度可饒性薄膜，使薄膜具有低的楊氏係數(Young’s modulus)和低的殘餘應力(residual stress)，薄膜表面鍍鋁用以反射或聚焦入射光線，藉由施加薄膜(鋁)和下電極間的電壓，可使有機可行變面鏡因靜電力形變進而形成曲率的變化，並藉此電壓來控制其度數(diopter,m^(-1))，成功做出可當作凹面鏡與凸面鏡使用的可行變面鏡，製作的可形變面鏡有大位移量與低驅動電壓的特性。最後我們將模擬的變焦系統實作出來，透鏡是請國研院儀科中心研磨而成，封裝外殼是請機構工程師幫我們設計，最後搭配我們實驗室製作的可形變面鏡組成一個變焦光學模組，成功做出1.3倍的變焦效果。

關鍵字

反射式光學；可形變面鏡；變焦系統；光學系統設計；鏡頭

並列摘要

Conventional zoom autofocus system effect is caused by changing position of lens via a motor, this method usually requires a larger space and causes greater power loss. In this thesis, we designed a reflective 2X zoom system. Reflective optics is a technology not only can make the space application become more efficient and flexible, but also has the advantage that it induces low chromatic aberrations. For nowadays, optical systems are asked to light weight and small size, it is an important topic to use reflective optics effective to achieve the goal. We use organic Micro Electro Mechanical Systems (MEMS) deformable mirror (DM) as a reflective element of zoom system, we fabricated a highly flexible Polydimethylsiloxane (PDMS) membrane which has low Young’s modulus (<10 GPa) and low residual stress. The incident beam is reflected or focused by the aluminum coating layer on the membrane. The optical power (diopter,m^(-1)) of DM is controlled by the electrostatic force results from the applied voltage between membrane (Aluminum coating) and bottom electrode pad. We successfully made available deformable mirror used as a concave mirror and a convex mirror. Advantages of the polymer DM have large stroke and low applied voltage. Finally we will build up a zoom optical system by three parts, lens is fabricated by Instrument Technology Research Center (ITRC), and package of module is designed by mechanical engineer, and the deformable mirror is produced by our lab. The zoom ratio is approximately 1.3 times.

並列關鍵字

Reflective Optics ； MEMS Deformable Mirror ； Zoom System ； Optical system design ； camera lens

參考文獻

[1] G. Vdovin, M. Loktev (2002). "Deformable mirror with thermal actuators." Optics Letters, v 27, n 9, p 677-679

[2] Loktev, M. Y., V. N. Belopukhov, et al. (2000). "Wave front control systems based on modal liquid crystal lenses." Review of Scientific Instruments 71(9): 3290-3297

[3] Paweł Wnuk, Czesław Radzewicz, Jerzy S. Krasi’nski (2005). "Bimorph piezo deformable mirror for femtosecond pulse shaping." Optics Express, Vol. 13, Issue 11, pp. 4154-4159

[6] F. Zamkotsian, V. Conedera, A. Liotard, A. Schroeder, N. Fabre, H. Camon, and P. Lanzoni, "Polymer-based micro-deformable mirror for adaptive optics applications," USA, 2004, pp. 144-54.

[7] C.-H. Li, H.-T. Hsieh, and G.-D. J. Su, "A fiber variable optical attenuator made by a large-stroke polymeric deformable mirror," IEEE Photonics Technology Letters, vol. 21, pp. 1432-1434, 2009.

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聚二甲基矽氧烷製備之高形變可形變面鏡運用於光學變焦模組

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