光放射光譜對化學汽相沉積法合成鑽石薄膜之研究

Optical emission spectrum study in grow diamond films by CVD

呂理暐(Lie-Wei Lu)

指導教授 ： 林諭男

淡江大學/理學院/物理學系碩士班/碩士(2010年)

https://doi.org/10.6846/TKU.2010.00092

摘要

本研究主要是利用微波電漿化學汽相沉積系統中用純氫氣、氬氣與氮氣的三種氣氛下沉積鑽石薄膜並在製成過程中，用光發射光譜(opical emission spectropy) 觀察電漿成分及變化，藉此討論電漿與成長鑽石薄膜的關聯性。(i)在甲烷/氫氣電漿中主要是成長出0.5-1um柱狀的鑽石結構也發現隨著壓力變化，大晶粒比例開始變多,而且非鑽石之碳物種以外其他物種比例也開始變多。(ii)在甲烷/氬氣電漿中可成長出2-10 nm的超奈米球鑽石結構。壓力變化下雖然表面形貌與內部結構都相似，但是以150 torr的表面形貌看起來較密集。(iii)在甲烷/氮氣電漿中成功的長出鑽石薄膜，其結構為50-100 nm針狀鑽石結構。另外，也發現2-10 nm的超奈米球結構，在80 torr以後有發現參雜效果增加，在氮氣電漿會產生參雜的效果，導致在氮氣電漿成長之鑽石薄膜有較好的場發射特性。

關鍵字

鑽石 ； 化學汽相沈積法 ； 奈米線 ； 氮氣 ； 超耐米晶鑽石膜

並列摘要

This research discussed to growth behaviar of diamond films in methane /argon, methane/hydrogen or methane/nitrogen plasma by MPCVD (microwave plasma chemical vapor depositon)。We examined the optical emission spectrum as to investigate the correlation between plasma and characteristics of diamond films。(i)With methane/hydrogen plasma, we obtianed columnar like diamond films which grain size about 0.5~1 um, besides We found that the relative proportion of larger grains and non-diamond carbonspecies is increasing with pressure。(ii)With methane/argon plasma, we obtained ultrananocrystalline diamond film count grain size about 2~10 nm. With methane/nitrogen plasma, we obrained acicular diamond films crystalline grain size about 50-100 nm, coexisting with the ultrananocrystalline diamond grains with size about 2~10 nm。In addition, we found acicular diamond grains in 80 torr, where the doping effect operating。The diamond films have better field emission value due to doping effect in the methane and nitrogen plasma。

並列關鍵字

MPCVD ； MCD ； UNCD ； Nanorods ； Diamonds ； Nitrogen

參考文獻

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