模造玻璃非球面透鏡陣列之研究

由於光電、半導體等器件的快速發展，高精度及客制化的元件需求量很大。光學元件已經從平面、球面、非球面發展為自由形狀的幾何形狀。隨著精密光學元件的複雜形狀和小尺寸的需求穩定增加，在開發新技術和改進現有方法以有效和經濟地生產這些技術方面已經作出了許多努力元件。微透鏡陣列（MLA）在小而輕的情況下，可以額外提供一些普通單透鏡系統中缺乏的3D資訊。因此，在光場攝像機、晶圓級光學和微型投影儀等系統中，扮演著重要的角色。然而，自由曲面的微透鏡陣列相當難加工及成形。當這些MLA由玻璃成形時，製作變得更加棘手。玻璃模造製程 (GMP) 是近年來實現精密玻璃光學元件量產的方法之一。本研究旨在微透鏡陣列的製作過程。本研究採用金剛石車削與微銑削技術結合的方法，製作用於GMP的MLA模仁。本研究採用了新型成型製程，孔板成型製程，以取代現有的玻璃板材成型製程，製作精密玻璃微透鏡陣列。研究中進行模擬和實驗了解形成過程。所得結果顯示，與現有的玻璃板材成型製程相比，新方法有顯著降低成形壓力並提供了更佳的成形性。

關鍵字

非球面透鏡陣列；玻璃模造；無電鍍鎳；退火

並列摘要

Owing to the fast development in opto-electronic, semiconductor, components of high precision and customized shapes are in great demand. The optical components have evolved from planar, spherical, aspheric to free-form geometries. As the demand for precision optical components with complex shape and small feature size steadily increasing, numerous efforts have been made in developing new techniques and in improving the existing approaches to efficiently and economically produce those components. On top of being small and light, micro-lens array (MLA) can offer some extra 3D information which the ordinary single lens system is lack of. As a result, MLA plays an important role in systems such as light field camera, Wafer Level Optics and Pico projector. However, the free-form shapes of MLA makes it rather difficult to machine and to form. Things get even tougher when those MLAs are to be made of glass. Glass moulding process (GMP) is one of these methods to enable mass production of precision glass optical components in recent years. This research aimed to study on the fabrication processes of MLA. Diamond turning in conjunction with micro-milling techniques are adopted in this research to fabricate molds for GMP of MLA. A novel molding process, hole-plate molding process, is adopted in this research to replace the existing glass plate molding process for fabricating precision glass micro-lens arrays. Both simulation and experiments are conducted in this study to investigate the forming process of MLAs. The obtained results show that, in comparison to the existing glass plate molding process, the new approach can dramatically reduce the forming pressure and offers much better formability.

並列關鍵字

Aspheric lens array ； Glass molding ； Electroless nickel ； Annealing

參考文獻

【2】折射式微透鏡陣列介紹 “

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【9】 Jiwang Yan, Tianfeng Zhou, Jun Masuda, Tsunemoto Kuriyagawa,“Modeling high-temperature glass molding process by coupling heat transfer and viscous deformation analysis”, Precision Engineering, 2009.

國際替代計量

模造玻璃非球面透鏡陣列之研究

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