數位相移條紋投影術應用於三維微米表面輪廓量測

本論文成功開發一套新型數位相移條紋投影顯微系統，用以量測微米級三維表面輪廓。在硬體部分，本系統整合數位投影機、影像縮小鏡組、立體顯微鏡、數位攝影機等。在軟體部分，本研究自行開發成像程式，其中使用黑白餘弦條紋結構光、七步相位移法、路徑獨立型相位展開技術、參考平面扣除法等。為了測試本系統之成像品質和解析度，本研究選擇螺絲(M2、M1.6、M1)和光纖(直徑30 μm、3 μm)做為量測試件。由實驗結果可知，本系統成功地成像三維螺紋曲面，量測解析度可達3 μm，且量測速度在0.5秒內。本系統與業界常用之共軛焦顯微鏡相比，系統架構簡單、操作容易、量測速度快、精度高，未來可應用於產品加工中之即時三維檢測，對於自動光學檢測產業有相當大的助益。

關鍵字

三維曲面量測；數位結構光；立體顯微術

並列摘要

In this thesis, a new digital phase-shift fringe projection microscopy system was successfully developed, which was used to measure the three-dimensional micro surface profilometry. In the hardware section, the system integrated with a digital projector, image shrink optical lenses, stereo microscope, CCD camera. In the software section, we developed the imaging program, utilized black and white cosine fringe pattern structure light, seven-step phase-shifting techniques, path-independent phase unwrapping, reference plane subtraction method. The screws (M2, M1.6, M1) and the fibers (diameter 30 μm, 3 μm) are also used as measuring objects to test the imaging quality and resolution of the system. According to our experimental results, the system successfully imaged three-dimensional surface. The measurement resolution was up to 3 μm, and the measurement speed could be within 0.5 second. Compared with the laser scanning confocal microscopy commonly used in the industry, the system is more superior for its simple system structure, easy operation, fast measurement speed and high precision. Moreover, the system can be applied to real-time three-dimensional detection in product processing, which will be greatly beneficial in the automatic optical detection industry.

並列關鍵字

Three-dimensional surface measurement ； Digital structured light ； Stereocopy

參考文獻

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國際替代計量

數位相移條紋投影術應用於三維微米表面輪廓量測

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