[4]S.C.H. Thian, et al., Dimensional measurement of 3D microstruture based on white light interferometer, Journal of Physics: Conference Series, 48 (2007) 1435.
[5]H.U. Danzebrink, L. Koenders, G. Wilkening, A. Yacoot, H. Kunzmann, Ad-vances in Scanning Force Microscopy for Dimensional Metrology, CIRP An-nals - Manufacturing Technology, 55 (2006) 841-878.