Abstract: Under the continuous improvement of manufacture technology, the appearance of product becomes more complex, and the precision request promotes day after day. Three dimensional measuring apparatuses have become indispensable tools of each level of precise industry, especially in the application of measurement. For example, it can be used to identify if the appearance and size fit in the standard of the blueprint. This research mainly uses Coordinate Measuring Machine(CMM). Parts to be measured include gauge block, geometric models, envelope of mouse, and battery cover. This research will measure above four different samples to rebuild their primitive model in three dimension by reverse engineering technology .To construct original three dimensional CAD model registered CAD model built by the blueprint and used to proceed the comparison of error checking . Furthermore, it can get the error analysis of each part of the surface.