光電廠預防保養作業人員金屬砷之暴露評估

本研究旨在評估光電產業廠區內晶元磊晶設備機台進行預防性保養(Preventive Maintenance ,PM)作業時，勞工暴露金屬粉塵之逸散情形。本研究係選取設備機台管路之拆卸作業、Cold Trap清洗作業、與高溫爐清潔作業等共三項設備機台PM作業進行評估。於勞工PM作業期間分別利用三節式濾紙匣與IOM個人採樣器，以高流率幫浦進行總粉塵與吸入性粉塵之採樣，同時也利用八階粒徑衝擊式採樣器與手持式微粒計數器，進行粉塵粒徑分布監測與評估。本研究亦針對高溫爐清潔作業進行擦拭採樣，採樣方法係參考NIOSH 9100所採集之樣本以ICP-MS進行金屬砷之分析。根據本研究結果顯示，設備機台管線拆卸作業過程採之總粉塵內含金屬砷濃度為0.513 (μg/m3)、Cold Trap清洗作業為470 (μg/m3)、高溫爐清洗作業則為2.19 (μg/m3)，其中Cold Trap清洗作業區所採集之濃度已超過暴露容許濃度標準0.01 (μg/m3)，該事業單位以提供現場勞工配戴正壓式供氣面罩進行防護，故平時應落實呼吸防護具之檢點，確保防護具正常使用效能。粉塵沉積暴露區域皆有所不同，其中管線拆卸作業區是以頭區(45.16％)為最多，其次是肺泡區(42.31％)，COLD TRAP清洗作業區則是以肺泡區(57.84％) 占最高比例，高溫爐烘烤作業區部分則是以氣管區(40.74％)為高。根據本研究擦拭採樣結果顯示，發現高溫爐清潔作業未能有效清潔表面汙染物，建議將原先以吸塵器清潔方式改為潔淨布擦拭再觀察其效果。在健康風險評估上，除Cold Trap清洗作業區勞工有較高風險外，其他兩項作業區健康風險值皆在可接受程度建議事業單位除提供適當呼吸防護具外，應定期實施教育訓練，訂定作業人員穿脫防護衣具之正確流程與衛生習慣教育，保持作業區環境清潔。

關鍵字

光電產業；磊晶機台； PM維護作業；暴露評估；粉塵粒徑分布；金屬砷

並列摘要

The purpose of this study is to evaluate the workers exposed metal dust during preventive maintenance (PM) operations on epitaxy equipment and machines in the optoelectronic industry. In this study, three equipment and machine PM operations were selected to evaluate, including equipment and machine piping, Cold Trap cleaning, and high-temperature furnace cleaning, respectively. During labor PM operations, three-section filter paper cartridges and IOM personal samplers are used to sample total dust and inhalable dust with high flow rate pumps. At the same time, eight-stage particle size impact samplers and handheld particle counters are also used to characterize dust particle size distribution. This study also conducted wiping sampling for high-temperature furnace cleaning operations. The arsenic were analyzed from the obtained samples by ICP-MS refer to NIOSH 9100 method. Results show that the total metal arsenic concentration obtained from dust during the pipeline disassembly operation of the equipment and machine was 0.513 (μg/m3), the Cold Trap cleaning operation was 470 (μg/m3), and the high-temperature furnace cleaning operation was 2.19 (μg/m3), respectively. We found the metal arsenic concentrations obtained from the Cold Trap cleaning operation area exceeded the exposure tolerance standard 0.01 (μg/m3). The employer has provided positive pressure air supply masks for on-site workers to wear. We suggest that it should be implemented regularly checkpoints of respiratory protective gear to ensure the efficiency of protective gear. The head area (45.16%) of exposure dust deposition areas was the largest in the pipeline disassembly operation area, followed by the alveolar area (42.31%). However, the alveolar area (57.84%) is the largest area in the COLD TRAP cleaning operation area. The proportion of high-temperature furnace baking operation area is higher than the gas pipe area (40.74%). According to the wiping sampling results, it was found that the cleaning operation of the high-temperature furnace failed to effectively clean the surface contaminants. It is recommended that the original vacuum cleaner cleaning method be replaced with a clean cloth to observe the effect. From the results of health risk assessment, we found that the workers in the Cold Trap cleaning operation area had a higher risk and the other two operation areas were acceptable. It is recommended that employer should provide appropriate respiratory protection equipment and conduct regular training to educate operators on the correct procedures for putting on and taking off protective clothing and hygienic habits to keep the working area clean.