近年來,位置定位系統在科技業應用非常頻繁,需要極佳高精度定位及高速性能的伺服機械系統是現今科技之主流。因此首先要克服的是平台移動時產生的摩擦力,而摩擦力往往造成平台定位誤差精度不足的重要因素。本文研究首先針對X軸線性馬達與Y軸由滾珠螺桿搭配伺服馬達所組成的龍門平台摩擦力鑑別,並採用LuGre摩擦力模型近似,根據此模型作為前饋控制器,以消除摩擦力所導致定位誤差。為了獲得模型的最佳參數,使用粒子群演算法與新穎的電荷演算法來鑑別系統、摩擦力模型與控制器參數。在控制器設計方面除了先前提到的前饋控制器外,還利用PD控制器增加系統穩定度、高增益觀測器解決微分不連續情況及干擾觀測器使系統可以消除外在干擾的特性,以達到高精度定位之需求。
In recent years, precise positioning and high-speed performance servo mechanical system has become the mainstream of technology development as it frequent use in technology industry. Hence, the friction is an important factor that leads to lack of precision for platform position, so conquer it when move platforms are necessary. However, this paper had research the X-axis liner motor and Y-axis ball screw which servo motor combine to Gantry stage identification of friction, and use the LuGre Friction Model which is resemble it. Therefore, according to this model as a Feed Forward Controller, it eliminates the error of orientation cause by friction. In order to retrieve the most accuracy data, it uses the Particle Swarm Optimization (PSO) and new Charge Search System (CSS) to distinguish systems, Friction model and controller parameter. In addition to the Feed Forward Controller, it also uses PD Controller to increase stability of system, the High Gain Observer to solve discontinuous situation of differential and the Disturbance observer to eliminate the external interference that achieves the demand of precise positioning.