- 學位論文
動態三維表面輪廓量測方法之研究
Research on new methodology for dynamic 3D surface profilometry
摘要
本篇文章中將提出一個嶄新的動態三維表面輪廓量測方法，是根據傅立葉輪廓術(FTP)與相移輪廓術(PSP)所重新定義的一種可以達到即時量測的複合式條紋輪廓術(CFP)，這是一種可以媲美PSP的量測精度，但是同時可以做到即時量測。將不同相位的正弦條紋進行編碼組合形成一種獨特性的圖案並且投影至物體表面上，利用三色相機取像並且由本實驗室所開發之帶通濾波器的方法進行處理。新開發的三維表面量測技術能夠進行每秒六十張的影像處理速度，所重建物件的三維輪廓是利用FTP萃取出的三個PSP的條紋進行相位重建。在初步的驗證階段，本方法將可以達到與傳統相移術的量測精度，並且即時獲得三維影像資訊的能力。針對重複性的量測時，針對標準階高所產生之最大誤差是整體量測高度的1.231%，準確度、精密度以及標準差分別為0.744、0.334、0.0387。
並列摘要
In this article, a novel composite fringe profilometry (CFP) method based on both of Fourier Transform Profilometry (FTP) and phase shifting principle (PSP) is newly proposed to achieve the measuring accuracy closely reaching to the same level by PSP, as well as one-shot imaging capability for achieving high-speed inspection. Multi sinusoidal colour fringe patterns are encoded to form a unique composite colour pattern for projecting onto the object’s surface, and its reflected deformed fringe image is taken by use of a triple-colour CCD camera and rapidly processed by the developed CSP method employing an innovative band-pass filter. A newly developed 3-D surface measuring method is capable of performing surface dimensional metrology at a high speed up to 60 frames per second (ftp) or higher. To reconstruct a 3-D profile of an object, a new strategy is developed to wrap three FTP-derived phases by using the PSP method, in which surface reconstruction can be performed robustly for a production of high-quality optical information. The experimental results preliminarily demonstrate that the method has capability to acquire 3-D maps at a high speed while the measurement accuracy being reaching up to that of traditional three-step PSP method. By measuring standard step heights in a repeatability test, it is confirmed that a maximum measured error can be controlled less than 1.231% of the overall measuring depth range. The accuracy, precision and standard deviations were 0.744, 0.334, 0.0387.