利用逆運算預測潔淨室內不同位置汙染源之研究

On the Prediction Various Locations of Contaminant Sources in a Cleanroom with the Probability-based Inverse Method

張恂禎(Hsun-Chen Chang)

指導教授 ： 胡石政

國立臺北科技大學/機電學院/能源與冷凍空調工程系碩士班/碩士(2013年)

摘要

一般潔淨室設計中對於汙染源的預測大多採取由已知點釋放汙染物(實驗或計算)，再觀察汙染源擴散的情況的方式來瞭解汙染物在潔淨室中的行為。但在真實運轉中的潔淨室，通常我們只能觀測到結果，而無法得悉汙染物由何處而來，若擬求解此類工程問題一般採取「逆方法」運算求解。本研究在模擬部分採用「以機率法為基礎」的計算流體力學逆運算估算一座三維潔淨室內的不同位置汙染源，並比對原先採取正向計算的結果。此外本研究亦透過實驗驗證本方法之正確性，將以實際相同規格潔淨室，使用甲苯模擬化學氣態汙染物釋放，並利用PID感測器模擬計算中的監測點，紀錄濃度與時間，其實驗數據與模擬結果比對後，兩者趨勢相符合；透過加權機率模式來計算，實驗與模擬所預測之最高機率汙染物發生源位置確實與預設汙染源之位置一致。

關鍵字

逆運算 ； 潔淨室 ； 汙染源偵測

並列摘要

The studies of pollutant dispersions and their spreading behaviors in a cleanroom, experimentally or numerically, are generally investigated based on the artificial emission sources. Detection of spreading pollutants in an operating cleanroom can be easily achieved using the respective indoor air quality monitoring systems but vice versa for the source identification. The identification of pollutant source is possible with the use of inverse numerical method. This study proposes a probability-based inverse method coupling with computational fluid dynamics (CFD) method, aiming to predict the pollutant source in an operating cleanroom with unilateral recirculation airflow field and compares the results with those obtained using the simulation model with an artificial source. The experiments were conducted in the same size cleanroom. Toluene was used as a tracer gas to simulate gas leakage in the Fab. PID Sensor were used to measure the toluene concentration field and the collected data were then used to compare with the simulation results. The agreement is seen to be quite good. By assessing the proposed probability weighting model, the location with the highest probability is found consistent with the default location of the artificial pollution sources

並列關鍵字

Inverse Methods ； Clean Room ； Sources of Pollution Detection

參考文獻

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