氮化(鈦鋁矽)薄膜切削特性之研究

A Study on Cutting Performance of (TiAlSi)N Films

蔡坤晉(Kun-Jin Tsai)

指導教授 ： 陳貞光 ； 謝耀南

國立臺北科技大學/工程學院/材料科學與工程研究所/碩士(2011年)

https://doi.org/10.6841/NTUT.2011.00046

摘要

薄膜技術在切削刀具上自80年代起即被廣泛運用迄今，從早期的二元單層薄膜逐步擴展到現今四元複合薄膜。本研究針對刀具以陰極電弧沉積法在刀具表面鍍覆TiN、TiAlSiN及AlTiN複合薄膜，比較刀具表面的鍍膜耐磨耗性，製備後的試片分別以掃描式電子顯微鏡觀察薄膜結構、膜厚及成份，並在高溫下進行氧化處理，利用XRD繞射分析觀察其薄模的高溫氧化特性，以及利用磨耗試驗及奈米壓痕試驗、分別觀測摩擦係數與薄膜之附著性。由實驗結果得知，TiAlSiN、TiN及AlTiN薄膜的平均摩擦係數分別為0.44、0.32及0.39，主要係受三種薄膜的粗糙度不同而影響，其中以TiN薄膜粗糙度最低，因此摩擦係數最低；而薄膜之厚度分別為2.0、1.75及1.78 μm，經壓痕測試得知三種薄膜均具有HF1-HF4等級的附著性。由XRD繞射觀察得知TiAlSiN、TiN及AlTiN薄膜分別在900、700、以及800°C以上時，膜層結構開始產生氧化反應，因此在三種薄膜中TiAlSiN的高溫穩定性最佳，同時由其切削後薄膜刀具的變化，可以了解其中以TiAlSiN複合薄膜較為硬脆，適合鑄鐵材切削；TiN附著性較佳，相對適合使用於韌性較高的不銹鋼材質切削；而AlTiN則適合較軟的鋁合金材料切削。

關鍵字

陰極電弧沉積法 ； 高溫氧化 ； 摩擦係數 ； 切削特性

並列摘要

Coating technology for cutting tools has since 80s been widely used. Quaternary system films are developed from earlier binary system films. The current study utilized Cathodic Arc Evaporation (CAE) to coat TiAlSiN, TiN , and AlTiN multilayer films on tool surface. The specimens were examined by scanning electron microscopy (SEM) to characterize film structures, thickness and composition. Films are also oxidized at high temperatures to observe changes in the coating structures using X-ray diffraction. Wear tests and indentation tests are also performed to evaluate their coefficient of friction and thin film adhesion, respectively. Results show that TiAlSiN, TiN, and AlTiN multilayer films bear coefficient of friction 0.44, 0.32 and 0.39, respectively. TiN bears lowest surface roughness and thus the lowest coeffeicient of friction in three coatings. The three films all have HF1-HF4 level adhesion. X-Ray diffraction reveals that TiAlSiN, TiN, and AlTiN films start to oxidize at temperatures above 900, 700, and 800 °C, respectively. The natures of three different coatings apparently affect their applicability for different materials cutting. Among the cutting tests of cast iron, stainless steel, and aluminum alloy materials, TiAlSiN is best adopted for cast iron cutting due to its brittle characteristics. TiN is applicable for cutting the tough stainless steels, while AlTiN performs better for aluminum alloy cutting.

並列關鍵字

Cathodic arc evaporation ； oxidation ； coefficient of friction ； cutting performance

參考文獻

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