光學式超解析法：文獻探討

Super resolution optics: a literature review

LeMinhQuan(Le Minh Quan)

指導教授 ： 陳亮嘉 ； 林世聰

國立臺北科技大學/機電學院/自動化科技研究所/碩士(2013年)

摘要

"Diffraction limit" has been understood for more than two centuries since it was discovered by Ernst Abbe, stating that the minimum lateral resolvable size of any lens-based imaging system is restricted by approximately the half of the illumination wavelength. Recently, with the rapid development and growing demands in many fields such as cell biology, semiconductor industrial, MEMS/NEMS, high precision measurement,…, etc., many novel techniques were developed and implemented in leading to potential establishments of advanced imaging systems with a resolving ability reaching beyond the diffraction limit from several hundreds to less than 100 nanometers. Although these new development are indeed significant as well as diversely influential to scientific breakthroughs, it still lacks of a comprehensive review on how these super-resolution imaging techniques were progressed and how they will be further advanced. Therefore, a comprehensive literature review was performed on the methods being developed and latest advances in super resolution techniques by means of critical analysis, classification and evaluation. Some conclusions were made to provide useful information leading for future development in this field.

關鍵字

Diffraction limit ； Rayleigh criterion ； super resolution ； sub-wavelength imaging

並列摘要

"Diffraction limit" has been understood for more than two centuries since it was discovered by Ernst Abbe, stating that the minimum lateral resolvable size of any lens-based imaging system is restricted by approximately the half of the illumination wavelength. Recently, with the rapid development and growing demands in many fields such as cell biology, semiconductor industrial, MEMS/NEMS, high precision measurement,…, etc., many novel techniques were developed and implemented in leading to potential establishments of advanced imaging systems with a resolving ability reaching beyond the diffraction limit from several hundreds to less than 100 nanometers. Although these new development are indeed significant as well as diversely influential to scientific breakthroughs, it still lacks of a comprehensive review on how these super-resolution imaging techniques were progressed and how they will be further advanced. Therefore, a comprehensive literature review was performed on the methods being developed and latest advances in super resolution techniques by means of critical analysis, classification and evaluation. Some conclusions were made to provide useful information leading for future development in this field.

並列關鍵字

Diffraction limit ； Rayleigh criterion ； super resolution ； sub-wavelength imaging

參考文獻

2. D. W. Pohl, W. Denk, and M. Lanz, "Optical stethoscopy: Image recording with resolution λ/20", Appl. Phys. Lett., vol. 44, no. 7, 1984, pp.651-653.

3. E. Betzig, and J. K. Trautman, "Near-field optics: Microscopy, spectroscopy, and surface modification beyond the diffraction limit", Science, vol. 257, 1992. pp.189-195.

4. G. E. Cragg and P. T. C. So, "Lateral resolution enhancement with standing evanescent waves", Optics Express, vol. 25, no.1, 2000, pp.46-48.

5. R. C. Dunn, "Near-field scanning optical microscopy", Chem. Rev., vol. 99, 1999, pp.2891-2927.

6. B. Hecht, B. Sick, and U. P. Wild, "Scanning near-field optical microscopy with aperture probes: Fundamentals and applications", Journal of Chemical Physics, vol. 112, issue 18, 2000, pp.7761-7774.