展示與驗證成功應用於潔淨室之控制方法

一般空調系統主要目的在提供人員舒適環境。而產業空調則在於強調提供最適設備生產條件，以提高產品良率，此時便需藉由控制系統達成恆定之溫濕度。專用的外氣空調箱(MAU)用於提供潔淨室新鮮空氣條件。比例、積分和微分(PID) 控制器調節安裝於外氣空調箱(MAU)的冷卻盤管及加濕器控制閥的開度，來達到控制潔淨室濕度。本研究的目的，是要找出實現精確濕度控制的方法。可用的溫度和濕度控制系統在半導體製造廠潔淨室已有討論和分析。本研究展示異常系統的成功改造，和利用串級控制和軟體修改，以提供穩定的濕度環境條件。提出的模式滿足在潔淨室相對濕度要求誤差於±0.2%。潔淨室製程排氣靜壓控制首重穩定可靠。數台風車並聯運轉，於風車啟停切換期間，靜壓仍需維持穩定，常見做法是以多組人員共同作業，本論文展示自動控制應用於模擬人工作業方式，以簡化人力並維持靜壓於±20Pa範圍內微幅變化(例如, 700±20Pa)。

關鍵字

潔淨室； PID ；串級控制；變頻器

並列摘要

The main purpose of HVAC is to provide a comfortable living environment. Meanwhile, for an industrial HVAC, it emphasizes on providing an optimum manufacturing condition to increase higher effective production rates and it is necessary to utilize the control systems to reach the constant temperatures and humidity. A dedicated make-up air unit (MAU) is installed to provide the conditioned fresh air to the cleanroom. Proportional, integral and derivative (PID) controllers modulate the openings of control valves of cooling/heating coils and humidifiers, installed in make up air units (MAU), to control the humidity in cleanrooms. This study aims to find methods to achieve the precise control on humidity. The temperature and humidity control systems in cleanrooms of a semiconductor fabrication plant are discussed and analyzed. This research demonstrates a successful modification of a failing system, and utilizes the cascade control and modified software to provide stable humidity conditions. The mentioned mode satisfies the control tolerances of relative humidity in cleanrooms requiring the tolerances in the range of ± 0.2%. The control on the static pressure of exhaust air system from the process zone in a cleanroom must be stable and reliable. For fans operating in parallel, it is essential to maintain and stabilize the static pressure in the supply air plenum during the interval time for starting-stopping the fans. It is a common approach to utilize several operators or team collaboration for running such control. This study shows the automatic control system applied to simulate the artificial practices. It is aimed to reduce the dependence on manpower and maintain slight variation of static pressure in the range of ± 20Pa (e.g. 700±20Pa).

並列關鍵字

Cleanroom ； PID ； Cascade control ； Variable frequency driver

參考文獻

[21] 曹志明，高科技廠房空調系統節能策略之研究，博士論文，國立台北科技大學冷凍空調工程研究所，台北，九十七年七月。

[2] M. Kotaki, Y. Yamakawa, T. Yamazaki, K. Kamimura and S. Kurosu, "A tuning method for PID controller that considers changes in system characteristics", ASHRAE Transaction, Vol.111, 2005, pp.13-22。

[4] K. Ozawa, Y. Noda, T. Yamazaki, K. Kamimura, S. Kurosu, "A tuning method for PID controller using optimization subject to constraints on control input", ASHRAE Transaction, Vol.109, 2003, pp.79-88。

[11] J.G. Ziegler and N.B. Nichols , "Optimum settings and automatic controllers", ASME Transaction,Vol.64, 1942, pp.759-768

[15] Institute of Electrical and Electronics Engineers, "IEEE Recommended practices and requirements of harmonic control in electrical power system", Standard IEEE 519-1992, Piscataway, NJ, 1993.

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展示與驗證成功應用於潔淨室之控制方法

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