非對稱交錯沉積五氧化二鉭薄膜之非均向光學特性研究

Anisotropic optical properties of asymmetric bideposited Ta2O5 thin films

賴俊榕(Chun-Jung Lai)

指導教授 ： 任貽均

國立臺北科技大學/電資學院/光電工程系研究所/碩士(2011年)

https://doi.org/10.6841/NTUT.2011.00212

摘要

本文結合斜向沉積技術與交錯沉積技術，以非對稱交錯沉積製鍍五氧化二鉭 (Ta2O5)，成長具有斜向鋸齒柱狀之非均向性薄膜，並以偏極轉換量測其雙折射特性，透過調變不對稱沉積角度情況下，討論各個沉積角度組合造成之奈米柱狀結構與其光學特性變化。結果顯示，此一方法可以大幅提升Ta2O5非均向性薄膜的雙折射特性，另一方面，不對稱之沉積角度於特定調變機制下，可製鍍一組Ta2O5非均向性薄膜，其三主軸折射率隨柱狀傾角增加而增加，此結果驗證經驗方程式 Tait’s rule，依此方法可以被突破。

關鍵字

交錯沉積 ； 三主軸折射率 ； 非均向光學薄膜

並列摘要

In this work, the anisotropic Ta2O5 thin films with tilted columnar structures are fabricated using asymmertic bideposition technology. The column angle of the anisotropic Ta2O5 thin film is modulated by controlling the asymmetric deposition angles. It is demonstrated that the asymmetric bideposition can enhance the birefringence of a tilted columnar thin film. It is different from the traditional Tait’s rule that a set of films indicates proportional relationship between the principal indices and the column angle.

並列關鍵字

bideposition ； anisotropic ； the principal indices

參考文獻

[1] D. Vick, M. J. Brett, K. Robbie, and T. Smy, “Self-shadowing and surface diffusion effects in obliquely deposited thin films,” Thin Solid Films. 339 pp. 88-94, (1999).

[2] D. J. Srolovitz, “Shadowing effects on the microstructure of obliquely deposited films,” J. Appl. Phys. Vol. 91, pp. 1963-1971,(2002).

[3] R. Messier, V. C. Venugopal and P. D. Sunal, “Origin and evolution of sculptured thin films,” J. Vac. Sci. Technol. A Vol. 18, pp. 1538-1545, (2000).

[4] Ming Li, Steve K Dew and M J Brett, “ Effects of electron distribution functions on the floating potential of particles in the plasma: thin plasma sheaths,” J. Appl. Phys. Vol. 32, pp. 2056–2059,(1999).

[5] K. Robbie, M. J. Brett and A. Lakhtakia, "First thin film realization of a helicoidal bianisotropic medium," J. Vac. Sci. Technol. A Vol. 13, pp. 2991, (1995).