微細加工單發放電能量對微球形探針之探討

Investigation of the Micro Spherical Stylus Forming by One Pulse Electro Discharge

鄭圳明(Tsun-Ming Jeng)

指導教授 ： 許東亞

國立臺北科技大學/機電學院/機電整合研究所/碩士(2009年)

摘要

微製造領域裡，微細放電加工技術是微小型化與超精密化的技術之一，為配合高科技精密加工技術發展微小零件量測開發技術，因此本研究主要探討 微放電加工方式配合單發放電加工技術，來加工製作最佳化之微球形探針。
如何製作符合量測需要的微球形探針是本實驗所探討努力的方向，經由實驗顯示利用不同峰值電流、電流開啟時間的單發能量加工條件下，可以立即形成不同直徑的鏡面微球形探針。當利用峰值電流3A、電流開啟時間70μs脈寬能量之單發放電加工條件下，可以立即形成直徑70µm的最佳鏡面微球形探針。當脈波寬度達至200μs，電流5A時球形探針的形狀便無法形成，而實驗顯示微球形探針的形狀趨近圓形時之最佳真圓度為脈寬70~130μs電流3A，微細軸直徑在40 µm時，單發放電所形成微球形探針真圓度最佳，其誤差值在2µm內，這是傳統加工所無法達到的。

關鍵字

微細加工 ； 微放電加工 ； 微球形探針 ； 放電加工

並列摘要

Micro coordinate measurement machine (Micro CMM) is one of the most important processes to measure the profile and dimensional size of the tiny components. However, in the micro manufacturing field, micro-electro-discharge process is one of the most important technologies of micro-minimizing and ultra precise machining method.
By way of the experiment to demonstrate under the conditions of different summit current, under different electric current in opening time of single shot energy, it may form the different diameter immediately the mirror surface micro spherical stylus . When using summit current 3A and single pulse discharge in opening time 70μs, it may form the best mirror surface of micro spherical stylus in diameter 70 µm immediately. But in different discharges energy of the pulse wave width, the micro spherical stylus shape size differs from; when the pulse wave width reaches to 200μs, and electric current 5A, the ball probe's shape is then unable to form, and experiment demonstrates that time micro spherical stylus shape approaches circle, it shows that best real roundness for pulse width 70~130 μs, and tiny axis diameter of 40 µm, the single pulse discharge forms the real micro spherical stylus roundness to be the best, its magnitude of error in 2 µm, which is unable to achieve by traditional processing .

並列關鍵字

micro discharge processing ； micro processing ； discharge processing ； micro ball probe

參考文獻

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