- 學位論文
以射頻磁控濺鍍法沉積類鑽碳薄膜於可撓性塑膠基板之研究
A Study of DLC Films Deposited on Flexible Plastics by R.F. Magnetron Sputtering
摘要
可撓性顯示技術為未來顯示器發展的新寵兒，塑膠基板具備透明、質輕、形薄及容易加工的優點，但其耐溫性、耐化性、表面平整性、耐刮、阻隔水氧滲透能力及硬度均較差，開發可撓性塑膠基材須先克服這些問題。本研究以RF非平衡磁控濺鍍系統，於聚碳酸脂（PC：Polycarbonate）上濺鍍類鑽碳薄膜，類鑽碳薄膜除了高硬度外，有優良的低磨擦性、耐磨耗性、耐蝕性等特性，因此應用其作為撓性塑膠基板之保護層，讓撓性塑膠基板可以有更廣泛的應用。 將鑽石靶材沉積的類鑽碳薄膜，以拉曼光譜來分析之，得到的ID/IG，主要分布在1~1.7，為了要得到較小的ID/IG，主要的影響因子為氣體壓力與R.F.功率。由SEM分析薄膜厚度，推出薄膜沈積速率為 10~40 nm/hr 。不同品質類鑽碳其接觸角有很大的差異性，經實驗得到接觸角範圍由 51°到112°，而對於接觸角影響較大的是類鑽碳薄膜的粗糙度。撓曲性能分析的結果顯示，撓曲速度會影響薄膜裂痕的密度，而撓曲次數則會影響不規則裂痕的產生。R.F.功率越大所沉積的類鑽碳薄膜也隨之增厚。而氣體流量則是因為氣體壓力越小，使得氣體平均自由徑變大，薄膜沉積效率變快、濺射能量變大，沉積的類鑽碳薄膜也越厚。同理，沉積時間、工作距離、旋轉等實驗參數趨勢也是薄膜厚度增加，光穿透率也就下降。光反射率光譜分析則與光穿透光譜剛好相反。
並列摘要
Transparent, light, thin and easy to manufacture are the outstanding features of plastic. However, it can't stand high temperature ,chemical ,permeating by mist, and its surface isn't smooth enough, neither hard enough. If the flexible ability of plastics is needed to be used or applied, these problems are the main defects that should be overcome. This research is based on deposited DLC on PC (Polycarbonate) by R.F. magnetron sputtering. By using the high hardness and the low friction coefficient of DLC then apply this as a protect layer on flexible plastics substrate. After deposited DLC onto the plastic thin film which might be able to apply this kind of film under any kind of circumstances. For the Raman spectrum analysis of DLC that is being deposited, the ID/IG is about 1~1.7. For deposition parameters of a smooth film under by R.F Power 50W, deposited time 1 hr, working pressure 5 mtorr, working distance 12 cm, rotation 15 rpm, the best surface roughness is 0.288 nm (Ra=0.288 nm). As the deposition parameters under R.F Power increase to 150W, deposited time 1 hr, working pressure 3 mtorr, working distance 9 cm, rotation 0 rpm, the best hardness can reach 13.74 GPa. The contact angle of DLC films ranges from 51° to 112° which is because of the effect of surface roughness which is a very crucial factor. From the observation of flexible test, the higher of speed, the crack's density is higher. By increasing the times of flexible test, it will arise the irregular cracks. Furthermore, as the thin film increases, the light transmission decreases. On the contrary, the spectrum of light reflection tendency and the spectrum of light transmission are totally different.