- 學位論文
應用UV/O3氧化程序礦化液相中二甲基亞碸之研究
Application of UV/O3 to Mineralize Dimethyl Sulfoxide in Aqueous Solution
摘要
有機溶劑如DMSO在TFT-LCD產業製程中被大量作為去光阻劑使用，然而現階段以傳統廢水處理程序並無法有效益地使其降解，本研究目的旨在將含有DMSO之溶液以高級氧化程序進行處理，期能為礦化此類物質找尋嶄新之處理方法。研究以O3為主之高級氧化程序，結合UV光以及H2O2等程序對於DMSO之礦化能力進行探討。實驗中以TOC為主要分析項目，其分析技術為UV/過硫酸鹽法，偵測方法為NDIR。實驗結果顯示對於不同條件之高級氧化程序，其DMSO礦化效益依次為UV/O3＞UV/H2O2＞UV/H2O2/O3＞O3＞H2O2/O3＞UV，而以UV光強度37.2mW/cm2(波長254nm)、臭氧劑量0.5×10–4mol/min 下，可於60分鐘內礦化95.5%之DMSO溶液(40mg/L)。其他實驗結果說明pH值於3~8之間對於程序反應之影響可被忽略。以DMSO進流濃度與礦化效益而言，則可藉由實驗歸納DMSO進流濃度越高(40、60、80mg/L)其TOC礦化效益越低(95.5%、75.0%、69.2%)，以不同氯離子濃度對於DMSO之反應速率探討中，結果顯示隨著氯離子添加濃度升高(0、10、20、30、50mg/L)則礦化效益越低(95.5%、90.8%、89.0%、87.5%、74.8%)，以不同硫酸鹽離子濃度對於UV/O3程序礦化DMSO實驗結果說明，UV/O3程序在礦化具極性之污染物時，系統中硫酸鹽離子濃度之多寡並無影響或抑制其處理效益，以不同二價鐵離子濃度對於UV/O3程序礦化DMSO之效益研究中，可觀察到系統中二價鐵離子濃度越高(0、10、20、30mg/L)，則DMSO之礦化效益隨之遞減(95.5%、78.6%、77.4%、65.5%)。本研究推導不同實驗條件對於UV/O3程序礦化DMSO之效益模型為{DMSO礦化效益(%)Y=0.462＋0.015X反應時間－0.007XDMSO濃度－0.006X二價鐵離子濃度}，式中實證結果資料數共五種項目、140值，R2=0.822，調整後之R2 =0.816，D-W值為0.650，三自變項F檢定=208.996(於95%信賴區間下)。然藉由模型可說明影響UV/O3程序礦化DMSO效益其中DMSO濃度以及二價鐵離子濃度較有可能造成礦化效率之降低，然提高反應時間將對整體礦化效益有正面幫助，另氯離子及硫酸鹽離子濃度將不對本程序之礦化效益有抑制或助益。
並列摘要
Organic solvent such as DMSO is known to be used as the photoresist stripper in TLC-LCD manufacturing industry. It is proven that DMSO is very difficult to be to mineralized, decomposed and removed through traditional biological wastewater treatment process. In order to find a novel treatment process for wastewater that contains DMSO, this study investigates different AOP procedures and operating conditions to evaluate the efficiency of mineralization of DMSO in synthetic water samples. The AOP procedures are O3-based and combine with UV or H2O2 in different ways. Total Organic Carbon (TOC) is the main analytical item in this study, and the analytical method used to quantify TOC is UV / Low Temperature / Persulfate / WetOxidation / NDIR (nondispersive infrared sensor) method. The results showed the efficiency of DMSO mineralization in different AOP procedures is as follows: UV/O3＞UV/H2O2＞UV/H2O2/O3＞O3＞H2O2/O3＞UV. As high as 95.5% of DMSO in 40 mL water sample can be mineralized within 60 min under UV irradiation with light intensity at 37.2mW/cm2 (Wavelength 254nm) and O3 dosage at 0.5×10–4mol/min. pH value for the water sample that lies between 3 to 8 is found no significant effect to the reactions of various procedures studied. The results indicated that the higher the influent concentration of DMSO (40, 60, 80mg/L), the lower the efficiency of TOC mineralization is observed (95.5%、75.0%、69.2%). The higher the influent concentration of Cl- (0, 10, 20, 30, 50mg/L), the lower the efficiency of TOC mineralization (95.5%、90.8%、89.0%、87.5%、74.8%) is concluded, Considering SO42- concentration as the factor, the results showed that SO42- concentration does not affect the extent of DMSO (a typical highly polar contaminant) mineralization under UV/O3 procedure. The higher the concentration of Fe2+ (0, 10, 20, 30mg/L), the lower the efficiency of TOC mineralization (95.5%、78.6%、77.4%、65.5%) is observed. This study also derived the multiple regression model for the efficiency of DMSO mineralization in water using UV/O3 process under different experimental conditions as follows:MODEL {DMSOη(%)Y=0.462＋0.015Xtime－0.007XDMSO conc.－0.006XFe2+ conc.}. The experimental data used in this model derivation include 140 set and can be classified into five categories with R2=0.822. After modification,R2=0.816, D-W=0.650 and F-statistic of the four independent variables is 208.996(under Confidence interval 95%). According to this model, the higher concentration of Fe2+, Cl- and DMSO would lower the mineralization efficiency of DMSO in water. On the other hand, the longer the reaction time sure and Fe2+ conc. are able to increase the mineralization efficiency of DMSO in water. As for the different levels of Cl- and SO42- concentration in the original water sample, it showed no obvious enhancement or inhibiting effect on the mineralization of DMSO.