奈米碳管為基本元件之感測器在呼吸照護之應用

敏感而能即時偵測呼吸停止之感測器在醫療照顧是非常重要的，奈米碳管作為電化學偵測器於近年來多有報告。相較於現行之科技，儘管它的敏感度及選擇性發展進步已是非常令人印象深刻，但是把奈米碳管應用為呼吸感測器基本元件的報告仍非常有限。本研究將借由連接化學物質3- aminoproprylethoxysiane (APTES)所形成之自我組裝單分子層(self-assembled monolayer, SAM)，將酸洗過之多壁奈米碳管吸附著在經熱化處理過之矽晶元表面所生成二氧化矽薄層上而形成偵測呼吸之界面，然後再借助微影製程、濺鍍技術與掀舉法方式將梳狀電極沉積於其上而形成本實驗之偵測單元。我們建立一個以上述多壁奈米碳管為基本元件之奈米機電系統平台去檢驗其對呼吸之物理與動態特性，此外、對奈米碳管與變動呼吸氣流形成之交互關係也將以探討。對於呼吸偵測之一個必須要能快速反應的要求，我們也找到其最佳偵測位置條件。奈米碳管之可作為呼吸偵測之長處為其能在一開放系環境有效的完成偵測及具有彈性迷你化之延伸設計。因此我們也延伸設計以本實驗的先導研究之部份結果作為新型呼吸醫療相關科技技術進一步發展的應用研究，本實驗研究過程及結果將可以作為未來應用呼吸醫療照顧之參考發展的基礎。

關鍵字

奈米碳管；呼吸偵測器；奈米機電系統；開放系環境

並列摘要

A sensitive breath sensor for real-time detection of apnea is important in medical care. Carbon nanotubes (CNTs) as electrochemical sensors were presented in recent years. Although such advances, compared to existing technologies, were impressive for its sensitivity and selectivity, CNT-based sensors for respiratory detection were limitedly reported. In this study, by a specific acid-treated procedure, multi-walled carbon nanotubes (MWCNTs) were immobilized on the thin silicon dioxide (SiO2) film, coating over a silicon wafer, through 3-aminoproprylethoxysilane (APTES) as the connecting component. APTES with aminoterminated(-NH2) group form a self-assembled monolayer on the surface of SiO2, which can facilitate the chemical bonding between the CNTs and the SiO2 layer. By means of it, CNTs can be immobilized on SiO2 to form another thin film for breathing detection. Then the techniques of “photolithography”, “sputtering”, and “lift-off” were implemented to develop the networks into micro-interdigitated parallel electrodes as a sensing unit. We design a testing platform, based on above sensing unit, forming a nano electromechanical system (NEMS) to check consistency between the physical properties of breathing and the dynamic work of the sensor. Besides, the moving physics and cross interactions between breath flows and CNT networks were also clarified. Upon the critical issue of response within respiratory cycle time, we identify the better position for detection of breathing. The advantages of CNT sensors for breathing lie on the effective works under an open system and extended applications with flexible miniaturization. Afterward, we utilize the knowledge from the basic experiments to design the clinical platforms for practical human tests, which facilitate the future medicine-related extension of this technology. We think that the studying processes and results of us can be used as one of the future bases in advanced breath care.

並列關鍵字

Carbon Nanotubes ； breath sensors ； nano electromechanical system ； open system

參考文獻

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奈米碳管為基本元件之感測器在呼吸照護之應用

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