高精度運動控制龍門平台應用在許多工業製造上,其中包含太陽能電池、平板、微電子產業、航空製造與檢測。然而,同步誤差與輪廓誤差將影響工件加工品質,當其誤差過大會導致工件加工跳機,因此,其龍門架構運動平台之同步與輪廓誤差控制在高速命令下對於高精高速製造與檢測變成很大的挑戰。 H型龍門平台的動態存在一些不確定性,其中包含參數變動,外部干擾與摩擦力,將交叉耦合誤差模型整合到PIDNN控制策略,保證雙軸馬達之追蹤誤差與同步誤差同時收斂至零。此外,疊代學習控制被應用於命令整型來改善其輪廓誤差。在PIDNN之網路結構連接權重疊代更新式是依據線上自我學習機制來獲得,而共平面軌跡是透過疊代學習對輪廓命令做補償,最後從實驗結果證實所提出方法是有效性。
High precision motion control of gantry stage has found numerous applications in the manufacturing industries including, solar cell, flat panel, microelectronics and aerospace manufacturing and inspection. However, the synchronous and contouring errors will influence the working quality of work-pieces and even lead to reject the work-pieces due to the over current protection. Hence, the control of the synchronous and contouring error in the motion stage of gantry configuration has become a challenge with increasing demands for high-speed and high accuracy manufacture and inspection. The dynamics of the H-type gantry stage with a lumped uncertainty, which contains parameter variations, external disturbance and friction force, is introduced. Then, to guarantee both of the position tracking and synchronous errors of dual motors converge to zero simultaneously, hence, a cross-coupled error model is derived and incorporated into the proposed PIDNN control scheme. Furthermore, the iterative learning control is applied for command shaping to improve the contouring error. In PIDNN, the connective weights of network structure are obtained by on-line learning algorithms. In contrast, the compensated contouring commands are generated by iterative learning for specified coplanar trajectories. Finally, some experimental results are illustrated to depict the validity of the proposed control approaches.