結合數位微鏡晶片之全域式彩色共焦顯微量測系統研發

目前三維形貌精密量測於工業界的應用日漸重要，其關係到產品的品質與生產效率。本研究旨在發展一套運用數位微鏡晶片之全域式彩色共焦顯微系統，結合數位微鏡晶片(Digital Micro-mirror Device，簡稱DMD) 與彩色共焦量測原理，利用數位微鏡晶片，控制光源投射出多個類似點光源之數位結構光，並快速依序翻動微鏡片完成橫向掃描，完全免除傳統機械式平台之移動，搭配彩色共焦顯微術軸向色散之特性，使聚焦點於軸向延伸，使系統不需做縱向掃描即可獲得待測物之深度資訊，係發展出高速、高解析之全域式彩色共焦顯微三維輪廓量測系統。有鑑於現有之共焦量測系統為求高速，量測方式漸由單點轉為線型，其線光源可視為空間中許多點光源排列成線之形式，而平行於狹縫方向則完全沒有空間濾波之能力，使各點光源產生相互干擾(Cross talk)的現象，導致系統解析能力降低；針對此問題，本研究使用之數位微鏡晶片，利用其微鏡片能精準控制光源的特性，控制各個點光源之間距，大幅降低各個點光源重疊而產生干擾(Cross talk)之現象，使得本研發之系統不僅可達到高速之全域式量測，同時又具有單點共焦顯微術之高解析量測效果。

關鍵字

彩色共焦；共焦顯微鏡；多波長；三維形貌量測；數位微鏡晶片

並列摘要

In the research, full-field chromatic confocal surface profilometry employing digital micro-mirror device (DMD) for spatial correspondence is proposed to minimize lateral cross talks between individual detection sensors. Although full-field chromatic confocal profilometry is capable of enhancing measurement efficiency by completely removing time-consuming vertical scanning operation, its vertical measurement resolution and accuracy are still severely affected by the potential sensor cross talk problem. To overcome this critical bottleneck, a DMD-based chromatic confocal method is developed by employing a specially-designed objective for chromatic light dispersion and a DMD for lateral pixel correspondence and scanning. Using this method, the full width half maximum (FWHM) of the depth response curve can be significantly sharpened, thus improving the vertical measurement resolution and repeatability of the depth detection.

並列關鍵字

Automatic optical inspection (AOI) ； chromatic confocal profilometry ； DMD ； in-situ measurement ； lateral cross talks

參考文獻

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結合數位微鏡晶片之全域式彩色共焦顯微量測系統研發

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