平面式三軸磁通閘磁場感測器之設計與分析

本研究以先前利用PCB印刷電路板製作磁通閘磁場感測器為理論基礎，設計平面的激發及感應線圈以及搭配磁通導引器，使感測維度推展至三軸。新型的設計將激發線圈與感應線圈整合於同一平面上，利用兩面的PCB電路板進行雙面曝光，以將激發線圈與感應線圈分別製作於兩片上，其後再加上十字形磁芯。第三軸的磁場感測，則是透過於磁芯上置放一肥粒鐵材料之空心圓柱作為磁通導引器，將垂直於平面之磁場會聚導引至十字形磁芯，並切換感應線圈之串聯模式進行感測。本研究針對磁通閘的設計進行模擬與實驗驗證，分析了磁通閘設計所涉及線圈尺寸、磁芯尺寸等對感測能力的影響，以及激發電流與頻率等條件設定所造成感測結果的不同。經實驗結果顯示，在最佳化之設計基礎上完成之磁通閘，X軸與Y軸的量測在激發頻率50 kHz及激發電流550 mA下，轉移率為122.42 V/T而1 Hz雜訊可達0.115 nT/√Hz。另外，在Z軸的量測則在激發頻率50 kHz及激發電流500 mA下，轉移率為11.61 V/T而1 Hz雜訊為6.29 nT/√Hz。此感測器設計驗證了具備三軸感測能力之平面線圈的磁通閘感測器之概念可行性，未來首要目標在於提升第三軸感測的磁場電壓轉移率，並以此概念進行晶片製作，期待實現為小體積、低功耗並具備三軸全域感測能力之磁通閘磁感測器。

關鍵字

磁通閘；磁場感測器；磁通導引器

並列摘要

In this study, taking the previous research results of PCB fluxgate in our laboratory as the theoretical basic knowledge, a new type of fluxgate with planar excitation and pick-up coils and a fluxguide is proposed for 3D magnetic field detection. In this new design, we use double-sided printed circuit board to integrate the excitation coil and the pick-up coil into the same plane, and adopt a cross shaped magnetic core to construct a complete sensing mechanism. To sense Z-axis magnetic field, we put a hollow cylinder of ferrite on the magnetic core as a fluxguide to guide the Z-axis magnetic field to the cores in X-axis and Y-axis, and switch the series connecting mode of the pick-up coils to get the correct output. In this study we analyze the parameters referred to the design of fluxgate such as the coil size, magnetic core size, excitation mode and so on. The experimental results shown that in the X and Y sensing mode, the sensitivity can achieve 122.42 V/T and the noise is 0.115 nT/√Hz at 1 Hz when excited with 550 mA and 50 kHz. In the Z sensing mode, the sensitivity can achieve 11.61 V/T and the noise is 6.92 nT/√Hz at 1 Hz when excited with 550 mA and 50 kHz. The performance of the sensor design verifies the feasibility of a fluxgate sensor comprising planar coils and a fluxguide for 3D field sensing. Further primary works to improve the performance includes enhancing the Z-axis sensitivity and realizing a silicon chip device of this kind, so that one can implement a fluxgate with small size, low power consumption, and 3D field sensibility.

並列關鍵字

fluxgate ； magnetic sensor ； fluxguide

參考文獻

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[5] H.U. Auster, etl., " The THEMIS Fluxgate Magnetometer" Space Science Reviews, vol.141, Nov 1–4, pages 235–264.

[6] Shoji Kawahito, Hiroshi Satoh, Masayaki Sutoh, Yoshiaki Tadokoro, " High-resolution micro-fluxgate sensing elements using closely coupled coil structures" Sensors and Actuators A: Physical, 1996, pages 612–617.

[9] Baschirotto, A., Dallago, E., Malcovati, P., Marchesi, M., & Venchi, G. “Development and Analysis of a PCB Vector 2-D Magnetic Field Sensor System for Electronic Compasses” , IEEE SENSOR JOURNAL,vol.6, NO.2, APRIL 2006

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平面式三軸磁通閘磁場感測器之設計與分析

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