本研究運用磁通閘(fluxgate)輸出電壓之時間域特性,設計磁量計驅動電路。激發磁場頻率、振幅、與磁芯磁滯曲線,是磁量計之磁場-電壓轉移率的主要影響因素。我們使用高磁透率鎳-鐵合金環形磁芯製作繞線式磁通閘,驅動電路使用磁場回授電路來提高磁通閘磁量計的靈敏度與線性範圍,以此基礎製作的磁通閘磁量計驅動電路可量測地磁等微小磁場。 論文中提出一利用磁通閘多重諧波特性做信號混合的新概念,製作磁通閘的硬體驅動電路,並且量測磁通閘實際運作能力,比較無回授系統以及回授時的信號差異;除製作硬體電路外也實際將提出的電路系統往IC化發展,利用HSPICE以及台積電CMOS 0.35μm製程完成實際模擬以及與磁通閘微結構進行整合下線,達到電路與微結構整合的初步目標。
The magnetometer driving circuit based on the time-domain output waveform of a fluxgate sensor is presented in this thesis. The frequency and amplitude of excitation and the hysteresis loop of core material are the major factors determining the field-to-voltage transfer coefficient of the fluxgate. The core material is the high permeability nickel-iron alloy. The demodulation driving circuit with feedback significantly enhances the sensitivity and linear range of the sensor. The proposed sensor is suitable for measuring the Earth’s static magnetic field. The design concept is to use the multiple-harmonic characteristics with mixing the signal, based on this idea to create the driving circuit, and measure the operate capability, and compare the signal perform between feedback and without feedback; in this thesis we use the TSMC 0.35-μm 2P4M CMOS technology is used to complete the frontend IC, which contains a fluxgate micro sensor and read-out circuit, achieve the initial purpose on integrate the sensor and circuitry.