- 學位論文
自動化半導體廠電力系統之故障診斷
Power System Fault Diagnosis for the Automated Semiconductor Factory
摘要
電力系統是半導體廠製造生產的中樞神經，一旦發生故障而造成電力停止供應時，將引起生產中斷，隨著復電時間的延長，產能與金錢損失就愈來愈大。當電力系統發生多重故障且有設備失效時，值班人員難以由大量的警報訊息中，立即判斷出故障發生的位置。即使是經驗豐富的值班人員，在面臨過大的壓力時，亦可能做出錯誤的判斷與操作，引起電力事故區域的擴大，延宕復電的時間，造成更大的損失。因此，本論文經由半導體廠電力系統的運轉特性分析，提出因果網路及規則矩陣為研究方法，增訂部份診斷的步驟，使其適應於半導體廠的電力運轉特性，經驗證即使面對多重故障且有設備失效的狀況下，診斷結果亦相當正確。此外，分析廠區支援設備的監視控制系統，提出可行性的故障診斷系統架構，可以藉此開發出一套電力故障診斷的輔助系統，將能更加快速、正確的協助值班人員，對電力故障區域進行隔離，並恢復電力供應減少產能損失。
並列摘要
Power system is the center to the production lines of a semiconductor factory. A fault in the power system may cause a shutdown due to the stop of power supply. Once the power cut lasts longer, the loss to the factory, either in yield or in money, will be bigger. However, when multiple faults happen and the protective devices become ineffective, it will be very difficult for on-duty personnel to immediately find out where the fault is and make a good judgment from abundant alarm messages. Even experienced on-duty personnel may make a wrong judgment and then take wrong action under great pressure. In such a case, the loss would become huge because the fault area may be expanded and it may take more time to get the power system restored. Hence the theme of this thesis is on the fault diagnosis which is specially made to adapt to the circumstances and operation of a semiconductor factory. By the analysis of the operation of the power system in a semiconductor factory and with “cause-effect network” and “rule matrix” as the method, some more check steps will be raised and added to adapt fault diagnosis to the operation of a semiconductor factory. This fault diagnosis is approved to work with experiment. A right judgment can be made without question with the fault diagnosis even if multiple faults happen and the protective devices become ineffective. Besides, an assistant system for the fault diagnosis of power system can be developed by analyzing the monitor and control systems of facilities in a factory and raising a workable frame of fault diagnosis system. It may help on-duty personnel isolate the fault area and get the power supply restored rapidly and correctly to reduce the loss.