薄膜電晶體液晶顯示器之鋁導線腐蝕不良解析

Analysis of Defect from Aluminum Wire Corrosion of TFT-LCD panel

呂欣怡(Sin-Yi Leu 呂欣怡)

指導教授 ： 方旭偉

國立臺北科技大學/工程學院/化學工程研究所/碩士(2010年)

https://doi.org/10.6841/NTUT.2010.00384

摘要

本論文主要描述了兩大部分。第一部分為探討薄膜電晶體液晶顯示器（Thin-film transistor liquid-crysral display）之鋁導線腐蝕不良成因；另一部份為運用改善製程的方法去減緩或抑制腐蝕不良現象。就第一部份，我們得知鋁導線腐蝕不良的成因是鋁線的線寬設計隨元件縮小而變窄後，流經金屬導線的電流密度變高，而原子在高電流密度作用之下所產生遷移，稱之為電遷移現象，因此導致鋁離子遷移而生成孔洞。
第二部份。我們發現閘極（Gate Pad）經過清洗製程後，會發生鋁金屬腐蝕，而且腐蝕區域會擴大，所以本研究中，我們藉由設備參數去調整清洗功率、溫度和環境條件去解決鋁導線腐蝕的問題，並使用量測儀器光學顯微鏡、聚焦離子束顯微鏡（FIB）與掃描式電子顯微鏡（SEM）暸解鋁端子腐蝕成因，和觀察腐蝕變化。

關鍵字

薄膜電晶體液晶顯示器 ； Gate Pad鋁金屬腐蝕 ； 孔蝕 ； 電遷移效應

並列摘要

This paper stadies two major topics. The first part discuss the defect cause of aluminum wire Corrosion for TFT-LCD (Thin-film transistor liquid-crysral display); The other is that can be employed the method of equipment parameter to retard or inhibit the corrosion defect.
The following is the first major topic. We learned that aluminum wire corrosion is caused by poor design with aluminum components reduce the line width is narrowed, the flow through metal wires with high current density changes, while the role of atoms in the high current density produced under the migration, the phenomenon known as electromigration, thus leading to migration of aluminum ions generated holes.

The following is the second major topic. We found Gate Pad after cleaning process, the aluminum metal corrosion occurs, and the corrosion area will be expanded, so we have to adjust parameters by equipment cleaning power, temperature, and environmental conditions to solve the aluminum wire corrosion problems.Then, it used measuring instruments optical microscope, focused ion beam (FIB) and scanning electron microscope (SEM) to understand the causes of aluminum terminals corrosion, and observe the changes in corrosion.

並列關鍵字

Thin-film transistor liquid-crysral display ； corrosion defect of Aluminum ； voiding corrosion ； electromigrarion phenomenon

參考文獻

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Brennen, C.E., "Cavitation and Bubble Dynamics", Oxford University Press, 1995.

Fontana, M. G.., "Corrosion Engineering ", McGraw-Hill Inc, 1986.

Kim, C.S., Shin, KB., Booh, S.W. and Soh, W.Y., "Simplified Impact Analysis Base on Equivalent Static Analysis for Impact Design of TFT-LCD Panel", SID, 2002.