以高真空壓鑄法製備陣列式氧化鋅奈米線及壓電特性之研究

Piezoelectric Property of ZnO Nanowires by High Vacuum Die-Casting Process

王建豪(Jian-Hao Wang)

指導教授 ： 張合

共同指導教授 ： 郭金國(Chin-Guo Kuo)

國立臺北科技大學/機電學院/機電整合研究所/碩士(2014年)

https://doi.org/10.6841/NTUT.2014.00656

摘要

氧化鋅(ZnO)屬於六方晶系中之纖鋅礦結構(Wurtzite)，由於此種結構對稱，且沒有對稱中心，具有良好的壓電特性，除此之外還具備半導體的性質，使得近年來一些研究，將氧化鋅奈米線應用在奈米發電裝置。本研究利用具有奈米孔洞之陽極氧化鋁(Anodic aluminum oxide，AAO)作為模板，以高真空壓鑄法將熔融之鋅金屬鑄入陣列且規則性排列的奈米孔洞中，製備深寬比達600以上之陣列式鋅(Zn)金屬奈米線，經退火處理可得陣列式氧化鋅(ZnO)奈米線。改變陽極處理時間，得到厚度分別約為50 μm、60 μm、70 μm之陽極氧化鋁模板而製備出具有高深寬比以及長度差異性較大之三種長度的奈米線，探討奈米線的機械性質以及壓電特性。奈米線之表面形貌、晶體結構及性質分析以掃瞄式電子顯微鏡(Scanning Electron Microscopy, SEM)、X光繞射分析儀(X-ray Diffractometer, XRD) 、原子力顯微鏡(Atomic Force Microscope, AFM)檢測。在Conductive-AFM的壓電特性測試，實驗結果顯示奈米線的長度越長，所量測到的壓電電流越大，陽極處理7小時的氧化鋁模板所製備出的氧化鋅奈米線所產生之壓電電流最大，可達到69 pA。

關鍵字

氧化鋅 ； 壓電奈米線 ； 陽極氧化鋁 ； 真空壓鑄

並列摘要

Zinc oxide crystallizes in hexagonal wurtzite, and it has no inversion symmetry (reflection of a crystal relative to any given point does not transform it into itself). Zinc oxide has superb piezoelectricity of the hexagonal ZnO. Besides, recent researches focus on piezoelectric power generation from ZnO nanowire due to its semiconductor properties. In this study, the Zn melt was injected into an anodic aluminum oxide (AAO) template by high vacuum casting technique to obtain aspect ratio of 600 of Zn nanowire arrays. After annealing, Zn nanowire arrays will become ZnO nanowire arrays. With various time of anodizing process, we can respectively obtain AAO template with thickness of 50 μm、60 μm、70 μm, in order to fabricate high aspect ratio and three different length of nanowire, also discuss its mechanic properties and piezoelectric characteristics. And we do analysis of its surface morphology, crystal structure and property inspections by scanning electron microscopy (SEM), X-ray diffractometer (XRD) and atomic force microscope (AFM). Under the piezoelectric property test of conductive-AFM, the results showed the longer nanowire can output larger current, the ZnO nanowire made by AAO template anodized 7 hours has largest current output of 69 pA.

並列關鍵字

zinc oxide ； piezoelectric nanowire ； anodic aluminum oxide ； vacuum die-casting

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