角度干涉儀之研發

Development of Angular Interferometers

徐偉傑(Wei-Jae Syu)

指導教授 ： 林世聰

國立臺北科技大學/電資學院/光電工程系研究所/碩士(2007年)

摘要

本文提出兩套角度干涉儀，第一套為使用旋轉分析板及方解石稜鏡之角度干涉儀，它具非等光程近共路徑干涉儀高靈敏度、高穩定度之特點。光學架設是角度變化造成通過方解石稜鏡之干涉光產生相位變化，該干涉光與另一參考干涉光通過旋轉分析板後，相位變化被鎖相放大器偵測出來，據此可反推角度變化量，因此實驗中方解石稜鏡被用來量測出角度變化，旋轉分析板用來產生週期性訊號。實驗上，本文所提干涉儀先以HP5529A雷射量測系統校正旋轉平台，然後量側值才與HP5529A比較，接著用它來量測位移平台之扭動(Pitch)與擺動(Yaw)，實驗結果驗證了它的正確性和可應用性。
第二套為使用方形稜鏡之角度干涉儀，同樣具非等光程近共路徑高靈敏度、高穩定度之特點，另外在-3°~3°量测範圍內有高的線性度，光學架設是角度變化造成通過方形稜鏡的干涉光產生相位變化，此相位變化與HP5529A雷射量测系統所偵測到的量测值做比較，實驗上干涉儀除了使用旋轉平台量测轉動角之外也使用位移平台量测Pitch與Yaw，實驗結果亦驗證了它的正確性和可應用性。

關鍵字

角度量測 ； 旋轉分析板 ； 方解石稜鏡 ； 干涉儀

並列摘要

This thesis proposes two sets of angle interferometer, the first set is an angular interferometer using a calcite prism and a rotating analyzer, the interferometer with the characteristics of unequal- and common-path have the performance of high sensitivity and stability. Optical setup is angle vibration makes interfering light phase change after through the calcite prism, than with another reference light pass through rotating analyzer, phase change is detected by lock-in amplifier, and this phase change can derive angle vibration, so calcite prism is measured the angle vibration, rotating analyzer is used for producing the periodic signal in the experiment. At the experiment, the interferometer first adjust the rotating stage by HP5529A laser measurement system, than measurement value is compared with HP5529A. Than measure Pitch and Yaw of translation stage. The experimental result has verified its validity and applicability.
The second set is an angular interferometer using square prism, the interferometer with the characteristics of unequal- and common-path have the performance of high sensitivity and stability at the same time, Beside, there is high linear degree in the -3°~3° measurement range, optical setup angle vibration makes interfering light phase change after through the square prism, this phase change is compared with measurement value of HP5529A laser measurement system, expect measure rotation stage in the experiment, also measure Pitch and Yaw of translation stage. The experimental result has verified its validity and applicability.

並列關鍵字

angle measurement ； rotating analyzer ； calcite prism ； interferometer

參考文獻

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