- 學位論文
高靈敏度石英溫度感測器之設計與製造
High Sensitivity of The Quartz Temperature Sensor Design and Manufacture
摘要
本研究理論利用壓電材料之本構方程式(Constitute Equation)、無限平板的運動方程式(The Infinite Plate of Motion Equation)和方向餘弦(Direction Cosines)，藉由Christoffel stiffnesses，求出壓電材料之特徵值(ci)、頻率常數(Nm,n)、基本頻率(fm(n))、一階頻率溫度係數、二階頻率溫度係數和三階頻率溫度係數，將以上方程式使用MATLAB之程式軟體自行開發兩套人機介面(Main_pro和contour)，模擬結果顯示切割角度為phi=90?and theta=4.1?之單一旋轉角度的石英晶片，頻率常數為1896.83 (kHz?mm)，在振盪特性為C Mode的厚度剪切模式下，一階頻率溫度係數94.007 [10-6/℃]為最大值，且二階頻率溫度係數61.4622 [10-9/(℃)2]和三階頻率溫度係數24.8797 [10-12/(℃)3]，其頻率與溫度的特性曲線圖之線性度Lin)T0=0.999為很好的直線性，而理論的靈敏度為94.0(ppm/℃)，故適合作為高靈敏度之石英溫度感測器。 本研究藉由合作公司的成品溫度特性測試製程，實驗發現石英溫度感測器之最佳的製程上，採用無倒邊晶片與抽真空封裝製程(Seam Sealing)，其可克服頻率偏移(Dip)之現象，其餘製程組合，抽真空封裝製程與倒邊晶片，會有模態轉變的現象，而灌氮氣封裝製程，有頻率偏移(Dip)之現象。 研究結果顯示吾人製作的石英溫度感測器，其實驗線性度為0.9~1之間、精確度(Precision)為220 ppm和準確度(Accuracy)為1520 ppm，而靈敏度(Sensitivity)為80 (ppm/℃)~85 (ppm/℃)之間或800[Hz/℃]~850[Hz/℃]之間，故溫度量測的精度可達0.0013℃~0.0018℃之間，其靈敏度優於美國大廠(STATEK)所生產名為The TS Quartz Temperature Sensors的石英溫度感測器，其靈敏度為34.5(ppm/℃)與46.4 (ppm/℃)。
並列摘要
The applied theories in this research are Constitute Equation, The Infinite Plate of Motion Equation and Direction Cosines of piezoelectric material. Christoffel stiffness is applied to generate the eigenvalue (ci), frequency constant (Nm,n), fundamental frequency(fm(n)), 1st order frequency of the temperature coefficient, 2nd order frequency of the temperature coefficient, and 3rd order frequency of the temperature coefficient. I then combined the above mentioned formulas with the “MATLAB” software to develop two sets of graphical user interfaces: Main_pro and contour. The simulation result is - when the cutting angle of the single rotating-angle quartz is =90 degree and =4.1 degree then the frequency constant (Nm,n) =1896.83 (kHz.mm); when the thickness shear mode of the oscillating property is in C mode, the maximum of 1st order frequency of the temperature coefficient T1f1 is 94.007 [10-6/℃], 2nd order frequency of the temperature coefficient =61.4622 [10-9/(℃)2] , and3rd order frequency of the temperature coefficient =24.8797 [10-12/(℃)3], then the linearity of the frequency-temperature characteristic curve design figure : Lin)T0=0.99999, which is sound. The sensitivity of this theoretical application is 94.007 (ppm/℃) , which is qualified to produce a highly sensitive Quartz Thermometer. Through the temperature-characteristic test process of the product of the collaborative company, the experiment in this research found the best process of Quartz Thermometer is to use a none-beveling chip combined with vacuum seam sealing, which can overcome the Dip of the frequency. The rest of the combinations: vacuum seam sealing with beveling chip cause the mode-changing phenomenon and the nitrogen seam sealing causes Dip of frequency. My quartz thermometer, of which the experimental linearity is between 0.90179 and 1, precision is 220 ppm, accuracy is 1520 ppm, and the sensitivity is between 80 (ppm/ ?C) -85 (ppm/℃) or 800[Hz/℃] -850[Hz/℃], reaches the accuracy between 0.00125℃ and 0.001765℃. It’s sensitivity is better than a quartz thermometer named “The TS Quartz Temperature Sensors” by American big brand Statek of which the sensitivity is 34.5(ppm/℃) and 46.4 (ppm/℃).