利用超音波噴霧輔助製備氧化鋅奈米結構

The Ultrasonic Spray Assisted Fabrication of ZnO Nanostructures

朱述賢(Shu-Hsien Chu)

指導教授 ： 王耀德

國立臺北科技大學/機電學院/光電工程系所/碩士(2006年)

摘要

本研究利用超音波噴霧輔助法，透過Vapor-Lquid-Solid (VLS) 機制在300℃~700℃左右長成氧化鋅奈米結構。先以超音波噴霧模式，將奈米金水溶液作為金奈米粒子的來源，在矽基板上沈積金奈米粒子。再利用通以氬氣之高溫爐，以氧化鋅粉末為來源，於沈積了金奈米粒子之矽基板上成長氧化鋅奈米結構。過程中，藉由改變成長溫度、成長時間、成長壓力、氣體流量、金粒子粒徑大小等參數，找出最佳的成長條件。實驗中由原子力顯微鏡(Atomic Force Microscope)、掃描式電子顯微鏡(Scanning Electron Microscope) 、光激發光譜儀(PL)等儀器測量平均粒徑、表面形貌、結晶型態等特性。

關鍵字

超音波噴霧 ； 氣-液-固 ； 氧化鋅奈米線

並列摘要

This research investigated the growth of ZnO nanostructures at 350oC~700 oC by ultrasonic-spray-assisted VLS(vapor-liquid-solid) mechanism. At first, gold nanoparticles deposited silicon substrates were prepared by ultrasonic spray pyrolysis using gold-contained solution. The average diameters of gold nanoparticles were measured by atomic force microscope. Secondly, ZnO nanostructures were synthesized on the gold nanoparticles deposited the silicon substrates by using ZnO powder as reaction source under ambient argon in a tube furnace. By changing the substrate temperature, the ambient pressures, the gas flow rate and the diameters of gold nanoparticles, their influences on the ZnO nanostructures were investigated. The characteristics of ZnO nanostructures were analyzed by scanning electron microscope and photoluminescence spectra to observe their average diameter, morphology and crystallization.

並列關鍵字

Ultrasonic Spray ； Vapor-Lquid-Solid (VLS) ； ZnO Nanowires

參考文獻

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